光刻技术：发展路径及未来趋势.pdf

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1、第3O卷第1期影像科学与光化学Vo1．3ON0．12012年1月ScienceandPhotochemisJan．，2012Lithography：ItsPathofEvolutionandFutureTrendsYoshikazuYamaguchi，AkimasaSoyano，MotoyukiShima(Sem∞nd“ctorMaterialsLaboratory，FineElectronicResearchLaboratories，JSRCorporation，100Kazvajiri—cho，YokkaichiMie512

2、—8550，Japan)Abstract：Opticallithographyplaysanimportantrolewithinhighvolumemanufacturing(HVM)ofsemiconductordevices．Most“Stateoftheart’’FabshaveimplementedArFimmersiontechnologytoday．Doublepatterning，doubleexposure，andside-wa11imagetransfertechnologyallowfortheextens

3、ionofArFimmersioninto32nmhaK-pitch(HP)application．Inordertofabricatefinerpatterns，itisnecessarytOdevelopnewprocesses．EUV1ithographyisa1eadingnextgeneranonsolutionfor22nmHPandbeyond．Inaddition，alternativesolutionssuchasnano-imprintlithographyandmaskqesstechnologyareal

4、sobeingconsideredforadvancednodes，however，theyareonlyinthedevelopmentstageatthistimeandintheircurrentstaterepresenta1otofchallengesforHVM．Inthispaper，anoverviewO±lithographyisdescribedfromtheaspectof“Materials”．Additionally，futuretrendsinlithographywillbediscussed．Ke

5、ywords：lithography；nanodevices；resolutionenhancement；photoresistmaterialsArticleID：1674—0475(2012)01—0001—08CIA2number：TN305Documentcode：AIntroductionDemandsforhighperformancechipshavebeendrasticallyincreasedaccordingtothedevelopmentofsmartphones，tablet—PCsandSOon．Sc

6、alingisanongoingchallengetofabricateachipwithmulti—functionsinalimitedspaceforsemiconductormanufacturers．Inaccordancewiththedesignrules，everytwoyearscriticaldimensions(CD)haveshrunkinhalfc¨．Scalinghasbeenrealizedbymakingaphotolithographypatternfinerandfinerbyimplemen

7、tingalightsourcethathasashorterwavelengthforlithography．Inthedevelopmentofphotoresistsforeachwavelength，suchasg-line，i—line，KrFandArF，itisnecessarytoselectsuitableresinplatformsinordertoobtaintransmittanceofthewavelengthbeingused．Sincesub一60nmHP，ArFimmersiontechnolog

8、yhasbeenintroducedanddeviceswith45nmHParemanufacturedinmass—DroductionlinebysingleexposureofArFimmersiontechniquestoday．For32nmHPan