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1、第33卷第11期中国激光Vol.33,No.112006年11月CHINESEJOURNALOFLASERSNovember,2006文章编号:025827025(2006)1121562205偏振分光镜分光性能非理想对激光外差干涉非线性误差的影响112陈洪芳,丁雪梅,钟志12(哈尔滨工业大学超精密光电仪器工程研究所,航天学院通信工程系,黑龙江哈尔滨150001)摘要为了减小激光外差干涉纳米测量的非线性误差,必须明确偏振分光镜(PBS)分光性能非理想对非线性误差的影响机制.推导出非理想情况下偏振分光镜透射率和反射率的激光外差干涉非线性误差模型,建立了偏振分光镜分光性
2、能非理想对非线性误差二次谐波的影响模型.仿真结果表明,偏振分光镜的透射率和反射率非理想对非线性误差的影响为一次谐波,且偏振分光镜分光性能越差,其对非线性误差的影响也越大.在偏振分光镜反射率为0.90的情况下,偏振分光镜透射率从1减小到0.90时,非线性误差由0.62nm增大到1.24nm.当存在偏振分光镜旋转角度误差时,偏振分光镜分光性能非理想引起的非线性误差不增加二次谐波分量,但增大了非线性误差一次谐波分量,严重影响非线性误差的大小.当偏振分光镜旋转角度误差为5b时,偏振分光镜透射率从1变为0.90,非线性误差从0.39nm增大到1.41nm.关键词测量;激光外差
3、干涉;非线性误差;透射率;反射率;偏振分光镜;二次谐波中图分类号TN247文献标识码AEffectofNonlinearitybytheNonidealSplittingPerformanceofPolarizationBeamSplitterinLaserHeterodyneInterferometry112CHENHong2fang,DINGXue2mei,ZHONGZhi1InstituteofUltra2PrecisionOptoelectronicInstrumentEngineering,HarbinInstituteofTechnology,Harbi
4、n,Heilongjiang150001,China2DepartmentofCommunicationEngineering,SchoolofAstronautics,HarbinInstituteofTechnology,Harbin,Heilongjiang150001,ChinaAbstractToreducethenonlinearityofnanometermeasurementinlaserheterodyneinterferometric,theinfluencemechanicsofnonidealsplittingperformanceofpol
5、arizationbeamsplitter(PBS)uponnonlinearitymustbeconfirmed.Inthepaper,nonlinearitymodelisproposedwhenpolarizationtransmissivityandreflectivityarenotideal.ModelisalsoproposedtodescribehowthenonidealsplittingperformanceofPBSinfluencesthesecond2harmonicnonlinearity.Thesimulationresultsshow
6、thatinfluenceofnonidealpolarizationtransmissivityandreflectivityonnonlinearityisthefirst2harmonicandtheinfluencewillbeseriouswhilethesplittingperformanceofPBSgetsworse.Whenreflectivityis0.90andtransmissivityofPBSreducesfrom1to0.90,nonlinearityincreasesfrom0.62nmto1.24nm.Whentherotation
7、angleerrorofPBSexists,thesecond2harmonicnonlinearitycausedbythenonidealsplittingperformanceofPBSwillbeineffective,butthefirst2harmonicnonlinearitywillincreaseandthenonlinearityisinfluencedgreatly.ItisassumedthattherotationangleerrorofPBSis5bandtransmissivityofPBSreducesfrom1to0.90,no
