wafer_saw_standard_operation_procedure_final

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1、Title:WaferSawStandardOperationProcedureDocumentNumber:3745-01-40001Revision:311.0Purpose目的ThepurposeofthisprocedureistoestablishwafersawstandardoperationforSDSSproducts.本规范的目的是建立SDSS晶圆切割工序程序书。2.0Scope范围ThisprocedureisappliedforSDSSproducts.本规范仅适用于所有SDSS的产品。3.0Rol

2、esandResponsibilities角色和职责3.1Primaryownerdepartment:ProcessEngineering拟定部门:工艺工程部3.2Review,approvalandimplementationdepartment(s):Q&RDepartment,ProcessEngineering,ProductionDepartment,EquipmentMaintenanceDepartment.评审，批准和执行部门：质量部，工艺工程部，生产部，设备维护部4.0ReferenceDocument

3、s参考文件No..SourceTitle/Description编号来源标题/描述1111-02-20001AgileProcessControlPlan3712-02-00017AgileInternalVisualInspectionCriteria3715-01-00003AgileESDControlProcedure2041-02-00017AgileIndirectmaterialspec0000-02-00002AgileProcessFMEA-DiePreparation3743-02-00006Agile

4、Directmaterial&keysupplycontrolworkinstruction3712-01-00006AgileQDNProcedure3745-02-40005AgileOCAPofwafersawprocess5.0Materials,Equipment,ToolsandSafety材料、设备、工具和安全5.1Equipmentandmaterial设备、材料和工具WaferDicer晶圆切割机DAFLasergrooving激光切割机DAFexpanding晶圆分离机CO2BUBBLER二氧化碳发生器

5、SawBlade划片刀LowPowerMicroscope低倍显微镜HighPowerMicroscope低倍显微镜Measurementscope500X500倍测量显微镜Frame铁圈FrameCassette提篮FingerCoats指套SanDiskConfidentialPage1of27Warning:ThisdocumentisUNCONTROLLEDandshouldnotberelieduponunlessobtaineddirectlyfromtheAgileDocumentControlSystemT

6、ODAY.Title:WaferSawStandardOperationProcedureDocumentNumber:3745-01-40001Revision:31ConductiveShoes导电鞋GroundedWorkTable接地工作台MarkPen记号笔Maskliquid保护液LasergroovingforLow-kwafer激光切割机5.2Safety安全5.2.1Alwayskeepalltables,shelvesandmachinecoverclean.所有工作台，架子和机台外壳，必须保持清洁.5

7、.2.2Alloperatorsshouldwearconductiveshoesandfingercotsonallfingers,maskwhilehandlingproducts.所有操作工在加工产品时必须穿戴导电鞋和指套(所有的手指都戴上)以及口罩.5.2.3Therevolutionofdicerspindleisquitehigh,becarefulnoanyoperationwithmachinecoveropensallowed切割机主轴高速旋转，不允许在机器盖板打开的状况下进行任何操作5.2.4Emerg

8、encycase紧急情况5.2.4.1Incaseofemergencypowerfail,turnoffalltheswitch,takeoutmaterial,thencontactwithfacilitytoconfirmthepowerandairpressure.Aftergettingfac