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1、HomeSearchCollectionsJournalsAboutContactusMyIOPscienceNano-structurefabricationforHgCdTeultra-fastinfraredsensorsThisarticlehasbeendownloadedfromIOPscience.Pleasescrolldowntoseethefulltextarticle.2009J.Phys.:Conf.Ser.188012023(http://iopscience.iop.org/1742-659
2、6/188/1/012023)TheTableofContentsandmorerelatedcontentisavailableDownloaddetails:IPAddress:218.108.29.238Thearticlewasdownloadedon20/03/2010at11:56Pleasenotethattermsandconditionsapply.8thChinaInternationalNanoscienceandTechnologySymposium(CINSTS09)IOPPublishing
3、JournalofPhysics:ConferenceSeries188(2009)012023doi:10.1088/1742-6596/188/1/012023Nano-structurefabricationforHgCdTeultra-fastinfraredsensors1231Shao-WeiWang,JianrongYang,YifangChen*,HonglouZhen,Xiaoshuang11Chen,WeiLu1NationalLaboratoryforInfraredPhysics,Shangha
4、iInstituteofTechnicalPhysics,ChineseAcademyofSciences,Shanghai200083,China2ShanghaiInstituteofTechnicalPhysics,ChineseAcademyofSciences,Shanghai200083,China3MicroandNanotechnologyCentre,RutherfordAppletonLaboratory,Chilton,Didcot,OX110QX,UK*E-mail:yifangchen@stf
5、c.ac.ukAbstract.High-speedinfraredsensorsarenecessaryforbroadapplicationsinopticfibrecommunicationswithhighdatacapacityandhighsecurityanddistancesensingbylaser.Inthispaper,anultra-fastinfraredsensorwith100nmballisticchannelshasbeenproposedandsuccessfullyfabricat
6、edbyelectronbeamlithography.Theareaofphotosensitivesurfaceisaslargeas100m×100mtoensureitshighsensitivity.Theprincipleisbasedontheballistictransportofelectronsinthenano-scalechannels.Thefrequencyisexpectedtobeintherangeof10GHz,oneortwoordershigherthanconventional
7、photovoltaicsensors.1.IntroductionInfraredsensorsarewidelyappliedfordomesticapplicationsforenvironmentalmonitoring,weatherforecast,safetyandhealthprotection,agricultureproductionandoptic-fibrecommunications.Inalltheseapplications,ultrafastsensorsbeyondhundredsof
8、megahertzareessential.Forexample,thestudyonchemicalchangesneedsveryhighspeed,especiallywheninfraredoutputisverylow.Conventionalhigh-speedinfraredsensorsaremadeusingph
