自旋阀巨磁阻位移传感器的制备研究.pdf

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1、自旋阀巨磁阻位移传感器的制备研究ResearchonFabricationofSpin-·ValveGiantMagneto—-ResistiveDisplacementSensor2011年4月钏币：兽寸拟符合合肥工业大学硕职称)彩霞戈名发纠炙烈玩索，可以采用影印、缩印或扫描等复制手段保存、汇编学位论文。(保密的学位论文在解密后适用本授权书)学位论文者签名磕，亏雪签字日期：≯f／年牛月刁日学位论文作者毕业后去向：工作单位：通讯地址：II导师签名：趣卉签字日期：“1年争月上产电话：邮编：移之间的输入．输出关系。关键词：自旋阀；巨磁阻；位移传感器IIISpin．valvegiantmag

2、neto—resistancePreparationofdisplacementsensorABSTRACTSpintronicsisanewdisciplinerapidlydevelopedsincetheninetiesoflastcenturv．Giantmagneto．resistance(GMR)effectinspin·basedelectronicshasattractedgreatattentioninthebusinessandacademiccommunitysinceitsdiscovery，withscientificimportanceandgreatpra

3、cticalvalue·Spintronicdeviceshaveadvantagesofnon-volatile，lowpowerconsumptionandhighintegration，andmainlyusedinmagneticsensors．randomaccessmemoryandhigh。densityreadheadsandSOon．GMRsensorshavebroadapplicationprospectsinautomationtechnology,householdappliances，satellitepositioning，navigation,autom

4、otiveindustryandmedicalcare．Thisthesisintroducedthediscoveryandresearchdevelopmentofthemagnetoresistanceef．fect，andtheGMRstructureandmaterials．Theprincipleofgiantmagneto．resistanceeffectwasdescribedbriefly．Theelectrontransportcbaracteristicsinspin．valvemultilayerandtheprincipleofresistancechange

5、ofGMRstructureinmagneticfieldwerediscussedin—depth．Wedesignthespin-valvegiantmagneto．resistivedisplacementsensorstructure，andthenusingL-editthelayoutoflithographymasksweredesigned，themasksweremade·Bythreephotolithography,physicaletchingandfilmdepositiontheWheatstonebridges(chip)consistedoftheGMR

6、thinfilmresistorsandmetalthinfilmresistorswerelabricated．TheeffectofetchingparametersonGMRthinfilmresistorsandtheoptimumetchingconditionwasobtained．ThebridgeswerepackagedafterI—Vtestofresistanceandbridgebalance．Theinput—outputcurvebetweenmagneticfieldanddisplacementwasobtainedbytestingthespin·va

7、lveGMRsensorchip·Keywords：spin-valve；GMR；displacementsensorIV致谢首先，我要衷心地感谢我的导师梁齐副教授，感谢梁老师在我读研期间对我的悉心的指导和鼓励。在我的研究生的学习期间，梁老师为我营造了一个氛围良好的学习和科研环境，在生活上也给予我极大的关心和照顾。在此谨向梁老师表示衷心的感谢和崇高的敬意。感谢合肥工业大学7年来对我的培养，在工大的7年是我人生最为重要的7年，这段经历将使我终生受