基于ANSYS Workbench的拾片头模态分析.pdf

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1、机床与液压Jun．2013HydromeehatroniesEngineeringVo1．41No．12DOI：10．3969／j．issn．1001-3881．2013．12．018ModalAnalysisofPickingChipHeadBasedonANSYSWorkbenchLIYaping，ZHONGPeisi，GONGWenfeng，LIGuili．AdvancedManufacturingTechnologyCenter，ShandongUniversityofScienceandTechnology，Qingdao266590，Ch

2、ina；2．AdvancedDesignandManufacturingResearchInstitute，GuilinUniversityofElectronicTechnology，Guilin541004，ChinaAbstract：Pickingchipheadisoneofthemostimportantmovingpartsofflipchipbonder．ItneedstoimplementreciprocatingfastmovingofXYZthreedirections．Modalanalysisisfounda—tionofth

3、estudyofpickingchipheadvibrationcharacteristic．3Dmodelofpickingchipheadises—tablishedwithPro／E．Themodeljssavedintheformatof．xt．andmodaIanalysisismadeer_importingthemodelintoANSYSWorkbench．Thefirsttenorderinherentfrequenciesandvibra-tionmodeofpickingchipheadareobtained．Thecalcul

4、ationresultsareanalyzed．Theresultsshowthatpickingchiphead’sfirst—orderinherentfrequencyis1455Hz．Itishigherthanworkfrequencyofpickingchiphead．Theresonancephenomenonwouldnotoccur．PickingchipheadhasbeRerdynamiccharacteristic．Keywords：modalanalysis，ANSYSworkbench，pickingchipheadrec

5、iprocatingfastmovingof．YandZdirections．1．IntroductionPickingchipmechanismmakesmovingpartspro—ducedgreaterinertiaforcebecauseofitslargeraccel—Flipchipbonder[1](FCB)isalsocalleddieeration(2-4g，1g9．8N／In)duringtherapidbonder．Itbondschipandchipcarriertogetherreciprocatingmotion．Its

6、insufficientrigiditystructurethroughtheprocessofpicking—up，rolling—over，willcauseresidualvibrationfromsuctionnozzleplacetransmission，recognition，dispensing，bondingandofpickingchiphead．Resonancegenerateswhenex—sooninthewayofchipbonding．FCBisoneoftheternalvibrationfrequencyandstr

7、uctureparts’certainmostimportantencapsulationdevicesinthefieldoforderinherentfrequencyaresameorsimilar[2]．microelectronicsencapsulationandisthekeydeviceTheaccuracyandeficiencyofpickingupthechipoflaterpackagingindustryandalsothefirstdeviceofwillbeaffected、directly．Somodalanalysi

8、sofpickingencapsulationprocess．chipheadisrequired．Pick