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1、毕业设计(论文)——外文翻译(原文)ElectrodelayoutofZnOpyroelectricsensorsAbstractTnthepresentstudy,anelectrodelayoutofpyroelectriesensorsisdevelopedtoimproveelectricsignals.Voltageresponsivityisamaintargettoenhaneetheperformaneeofpyroelectricsensors・Apartiallycovered,topelectrodehasb
2、eenproventoeffectivelyincreasethevoltageresponsivityofpyroelectricsensors.IntheexperimcntalresuIts,theproposedelectrodelayoutwithanarraytypeinZnOpyroelectricsensorspossessedhighervoltagesignals,about3.6timesthatofafullycoveredtype,andabout2timesthatofapartiallycovered
3、type.Moreover,afiniteelernentmodelisusedtoexplorethetemperaturevariationrateinZnOpyroelectricsensorsforboththefullycoveredandthepartiallycoveredelectrodes.Inthesimulationresults,thepartiallycoveredelectrodecanindeedimprovethetemperaturevariationrateintheZnOlayer.Keywo
4、rds:MEMS;Pyroelectric;Sensor;ZnO1.IntroductionMultilayerpyroelectricsensorshavebeensuccessfullyusedinmanyapplications,suchaspollutionmonitoring,hotimagedetectors,intruderalarms,andgasanalysis.Theypossessmanyadvantagesincludingnon-cooleddetection,room-temperatureoperat
5、ion,lowersystemcosts,fastspeeds,port-ability,havingawidespectralresponsewithhighsensitivityandbeingintegrablewithon-chipcircuitry[1-3].Theconventionalpyroelectricsensorsarecomprisedofapyroelectriclayersandwichedbetweentopandbottomelectrodes・Thetopsideisexposedtoaheats
6、ource.Thedynamicresponsecurrentofpyroelectricsensorsisproportionaltothetemperaturevariationrateofpyroelectrielayers[1].Ahighertemperaturevariationrateinthepyroelectrielayerleadstoahigherresponsecurrentforthepyroelectricsensors.Apartiallycovered,topelectrodehasbeenprov
7、entoresultinahigherresponsivitythanthatofafullycoveredelectrodebecauseitopenswindowsfortheZnOlayertoclirectlycomeintocontactwiththeheatsource[4].Therefore,theelectrodelayoutplaysonii叩ortemtroleinpyroelectricsensors.Thisconcepthasbeenexpandedtoetchathree-dimensionalpat
8、ternontheresponsiveelementofLiTaO3;lateraltemperaturegradientswillbeinducedonthesidewallofresponsiveelementsunderhomogenous