TFT工艺流程、材料、设备、生产常用中英文标准名称2.doc

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1、一．TFT工艺流程中英文标准名称ArrayProcessFlow阵列段工艺流程Input投料Unpacking拆包装Initialclean预备清洗Particlecount尘埃粒子测试Gate栅电极层Cleanbeforedepo成膜前清洗Gate（Mo/Alalloy)Filmdepo栅电极成膜RSmeter电阻测量MacroInspection宏观检查CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry(VCD)光刻胶低压干燥PRsoftbake前烘Expose曝光TitlerExpos

2、e/EdgeExpose打标/边缘曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查Mic/MacInspection宏微观检查CDafterdevelop显影后关键尺寸检查Totalpitch长寸测量GateWetetch栅电极湿刻Contactangle接触角测量PRstrip光刻胶剥离CDafteretch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/MacroInspection宏微观检查LaserRepair激光修补Active层Cleanbeforedepo成膜前清洗ActivefilmdepoActiv

3、e成膜AOI自动光学检查MacroInspection宏观检查ThicknessMeasurement厚度测量CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry光刻胶低压干燥PRsoftbake前烘Expose曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查Mic/MacInspection宏微观检查ActivefilmDryetch&AshingActive膜干刻与灰化ThicknessMeasurement厚度测量PRstrip光刻胶剥离AEI刻蚀后自动光学检查Mi

4、c/MacroInspection宏微观检查S/D源/漏电极层Cleanbeforedepo成膜前清洗S/DMofilmdepo源/漏电极成膜RSmeter电阻测量MACROInspection宏观检查CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry光刻胶低压干燥PRsoftbake前烘Expose曝光Edgeexpose边缘曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查MIC/MACInspection宏微观检查CDafterdevelop显影后关键尺寸检查Har

5、dbakebyoven烘炉坚膜S/DMoWetetch源电极/漏电极湿刻n+a-SiDryetchn+高掺杂膜干刻PRstrip光刻胶剥离ThicknessMeasurement厚度测量CDafteretch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/MacroInspection宏微观检查CleanbeforeO/Stest短路/开路测试前清洗Open/ShortTest短路/开路测试Passivation保护层Cleanbeforedepo成膜前清洗Pass'nfilmdepo保护膜成膜AOI自动光学检查MACROInspecti

6、on宏观检查ThicknessMeasurement厚度测量CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry光刻胶低压干燥PRsoftbake前烘Expose曝光Edgeexpose边缘曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查Micro/MacroInspection宏微观检查SinXDryetch&ASHING氮化硅干刻与灰化PRstrip光刻胶剥离AEI刻蚀后自动光学检查Micro/MacroInspection宏微观检查ITOITO层Cleanbefor

7、ePR成膜前清洗a-ITOfilmdepoITO成膜RSmeter电阻测试Anneal煺火MacroInspection宏观检查CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry光刻胶低压干燥PRsoftbake前烘Expose曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查Micro/MacroInspection宏微观检查ITOfilmetchITO膜湿刻PRstrip光刻胶剥离AEI刻蚀后自动光学检查Micro/MacroInspection宏微观检查FinalE

8、/T最终电测Anneal煺火Arraytest阵列测试Arrayrepair阵列修补TEGtestTEG测试Sort分级CellProcessflow