TFT_array制程动画演示.ppt

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1、TFT阵列制程一玻璃基板清洗玻璃基板清洗透明导电薄膜溅镀成型glass溅镀栅极线CS（电容）gas：KrN2涂光阻胶玻璃基板涂光阻胶暴光玻璃基板掩膜清除已经发生化学变化的光阻胶玻璃基板蚀刻玻璃基板去光阻胶玻璃基板栅极Cs（存储电容）栅极Open/ShortTextglasstext二I/SPEP清洗玻璃基板清洗AP-CVDglassSiH4O2N2GateSiOx清洗玻璃基板清洗P-CVDglassSiH4N2ON2SIH4NH3N2SIH4H2SiH4NH3N2SiOxg-SiNxa-siSiNx

2、ClenaingglasscleaningO2ashingglassSiNxSiOxCoating(涂覆光阻胶)glassBackexosreglassExposure（暴光）glassDeveloping（显影）glassWetetching（湿蚀刻）glassStrip（剥落光阻胶）glass三AIPEPcleaningGlassN+cleaningP-CVDglassN+a-siCoating（涂覆光阻胶）glassExposure（暴光）glassDeveloping（显影）glassCDE

3、dryetching（干蚀刻）glassStrip（剥落光阻胶）glass四PXPEPCleaningglassITOcleaningITOsputter（ITO溅镀）glassITOsputterITOcleaning（ITO清洗）glasscleaningCoating（涂覆光阻胶）glassExposure（暴光）glassDeveloping（显影）glassWetetching（湿蚀刻）glassStrip（剥落光阻胶）glass五THPEPCoatingglassExposure（暴光）

4、glassDeveloping（显影）glassWetetching（湿蚀刻）glassSttip（剥落光阻胶）glass六SLPEPClenaingglassS/DcleaningS/DSputter（SourseDateLine溅镀）glassS/DsputterS/DCleaning（S/D清洗）glasscleaningCoating（涂覆光阻胶）glassExposure（暴光）glassDeveloping（显影）glassS/DEtching（S/D蚀刻）glassN+Cut（N+切割

5、）glassStrip（剥落光阻胶）glass七PVPEPCleaningglasscleaningP-CVDglassCoating（涂覆光阻胶）glassExposure（暴光）glassDeveloping（显影）glassDryetching（干蚀刻）glassStrip（剥落光阻胶）glassTEXTglassTEXTglass知识回顾KnowledgeReview