MEMS复习攻略.doc

《MEMS复习攻略.doc》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、特此感谢：卓著、王明斗、兰天翔、唐小涛、周孝吉对本攻略的贡献。董建鹏2015/1/14简述：1、只是包含MEMS中需要自己总结的内容比较多的知识（除ppt6-7一些琐碎的概念，其他章节部分需要总结的基本已涵盖）。2、时间仓促，做得可能不是很完善请谅解。3、英语水平有限，单词语法错误自己改正4、若有错误或没有涉及到的还望大家补充改正（英语）。5、.祝各位取得好成绩！！！！！151.difference:MEMSisaprocesstechnologyusedtocreatetinyintegrateddevicesors

2、ystemsthatcombinemechanicalandelectricalcomponents.NEMSisagreatdevelopmentofMEMS.Content:(1)Scalesize(2)Material(3)ProcesstechnologyMEMSNEMSBasicmaterialSiliconCarbonMEMSNEMSScaleSize1.Component:1um~100um2.Device:0.1mm~1mm1nm~100nm(4)Principle(5)Feature(6)Applic

3、ation(自己酌情删减)MEMSNEMSProcesstechnology1.Miniaturizedmachinetool2.Wetetching3.Dryetching(RIEANDDRIE)4.Electrodischargemachining(EDM):5.LIGA(X-ray)1.AFM/STMinducedoxidationmethod2.Electron-beamlithography(>20nm)3.Atomormoleculeassemblytechnique15MEMSNEMSprinciple1

4、.Highpowerdensity(Micro-scaleeffect)2.Largesurfaceareatovolumeratiomakessurfaceeffectsdominantovervolumeeffect.3.Largethermalconductivity1.Nano-scaleeffect2.Quantumeffect3.InterfacialeffectMEMSNEMSfeature1.Twodimensionorquasi-ThreedimensionStructure2.Highprecisi

5、on2-Dcontrol3.Integrationmassproduction4.lowpowerandless1.Ultra-smalldimension2.Ultra-highfrequencyResponse(morethan100MHZ)3.Ultro-lowpower15inertiaMEMSNEMSApplication1.Targeteddrugdeliverysystem2.Miniaturerobotsystem1.Biologicalmotor2.Ultra-highfrequencyRFreson

6、ator1.扰动执行器的组成及其运动过程：ScratchDriveActuator(SDA)（1）component：platebushinginsulator（绝缘体）substrate(2)processa）AppliedvoltagebendsSDAdownwardb)Whenreleased,SDAreturnstooriginalshape15b)ReapplyingvoltagecausesSDAtomoveadistance’dx’1.Patterntransfer（1）thinfilmonsubstra

7、teSilicondioxideisdepositedasstructuralorsacrificialonthesubstratebyPVDorCVD.（2）photoresistcoatedResisttypically1um.Spinresistalwaysbeusedtoachieveauniformthinsurface.（3）patternphotoresistWaferistransferredtoanexposuresystemwhereitisplacedbetweenaphotomaskandexp

8、osedwithanultravioletradiation.（4）resistdevelopmentThephotoresistcoatedwaferundergoesdevelopmentstagewhere15selectivedissolvingofphotoresisttakesplace.（5）etchofthethi