HBT 功率放大元器件介绍.ppt

《HBT 功率放大元器件介绍.ppt》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、IntroductionofSUNTEKHighSpeedInGaPHBT1Contents1)SuntekHighSpeedInGaPHBTEpiStructure2)InGaPHBTCrossSectionandProcessFlow3)PatternDimension4)SEMTopViewofHighSpeedInGaPHBTwithAir-Bridgeprocess5)GummelplotsandI-V6)HighSpeedInGaPHBTRFPerformance2TwoInGaPlayersintheemitterSunte

2、kHighSpeedInGaPHBTEpiStructure3InGaPHBTCrossSectionandProcessFlowEmittermetal(WSiN)Emittermesa:DryetchingSelectivewetetchingBasemesaI/IisolationBasemetalCollectoretchandmetalMIMdielectricandVia1ThinfilmNiCrresistor(30/)Metal1PassivationAir-bridge(M2)processps:TaNisalsoa

3、vailable(50/)PolyimideprocessalsoavailableCollectorContactLayerCollectorLayerGuardRingBaseLayerEmitterContactLayerEmitterLayerHeatsinkEmitterairbridge4PatternDimensionAir-BridgeProcessPolyimideProcess5SEMTopViewofHighSpeedInGaPHBTwithAir-Bridgeprocess1.4x20um22x20um2Two

4、sidebaseTwosidecollectorAir-bridge-in2.1x20um2TwosidebaseTwosidecollectorAir-bridge-out3.1x5um2,1x10um22x5um2,2x10um22x15um2OnesidebaseOnesidecollector6GummelplotsandI-VTheidealityfactorofcollectorcurrentandbasecurrentis1.02and1.15,respectively.78HighSpeedInGaPHBTRFSpecan

5、dPerformance9NeedInformationfromCustomerProcess:PolyimideorAir-bridgeprocessFinalwaferthicknessDeviceDCandRFspec.andoperatingconditionMinimumdevicedimensionModelrequirementS-parameter(biascondition)ActiveModelPassiveModel10