BT Imaging公司设备介绍英文.pdf

《BT Imaging公司设备介绍英文.pdf》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、LIS-R1IntroductionBTImagingPtyLtd-ConfidentialInformation-NotForDistribution1Agenda•R1Overview•R1Features•CustomerBase•R1ApplicationExamplesBTImagingPtyLtd-ConfidentialInformation-NotForDistribution2LIS-R1Overview•Flexible-PL,EL,RS,QSS-PC,lifetimeimageinasingletool•Wafer,Cell

2、sandBlocks(optional)•UsePLatanyprocessstage•Correlateswithothertechniques•HighestResolutionImages•1megapixel•FastestDataAcquisition•1secondforcellsSpeedsupR&D,characterizationandrootcauseanalysisBTImagingPtyLtd-ConfidentialInformation-NotForDistribution3CapabilitiesbySampleTy

3、peCapabilitiesSiliconSiliconSiliconBlockWaferSolarCellPhotoluminescenceImageAverageInjectionlevelDependantLifetime(QSS-PC)EffectiveMinorityCarrierLifetimeImageElectroluminescenceImageSeriesResistanceImageBTImagingPtyLtd-ConfidentialInformation-NotForDistribution4PVsupp

4、lychain-applicationsforluminescenceimagingPL:EL:Siingot/brickAs-cutwaferProcessedwaferFinishedcellModuleWafermanufacturingCellmanufacturingModulemanufacturingBTImagingPtyLtd-ConfidentialInformation-NotForDistributionBackground-LifetimeinSiingotsTop:segregatedtransitionmetalsC

5、entre:higherlifetimehighercontentofcarbonSide:diffusionoftransitionmetalsBottom:highercontentofoxygendiffusionoftransitionsmetalsµ-PCD123456µsCourtesyofDrArminMuellerBTImagingPtyLtd-ConfidentialInformation-NotForDistributionPLimagingofSibricksPLm-PCDTime:30sTime:900sRes:165mm

6、Res:1mmExcellentqualitativeagreementwithm-PCDscansforalargenumberofbricksBTImagingPtyLtd-ConfidentialInformation-NotForDistributionPLimagingofSibricksSouthEastNorthWestEdgeBrickBTImagingPtyLtd-ConfidentialInformation-NotForDistributionPLimagingofSibricksNorthEastSouthWestCor

7、nerBrick0100018000100BTImagingPtyLtd-ConfidentialInformation-NotForDistributionPLimagingofSibricksBrickEdgeWaferCornerWaferBTImagingPtyLtd-ConfidentialInformation-NotForDistributionPLimagingofSibricksBrickTopWaferBottomWaferBTImagingPtyLtd-ConfidentialInformation-NotForDistri

8、butionPLimagingofSibricksPLm-PCDBTImagingPtyLtd-ConfidentialInformat