TRS_datasheet_1.pdf

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1、NEWOptimizeyourtexturingprocesswithin-linereflectivitymonitoringTRSSensorwafersConveyerFeatures&Benefits¾Realtime,reliable,processmonitoring¾Immediateidentificationofproblemsintheprocess¾In-situinstallation–doesnotrequireoff-linestation¾Fastmeasurement–upto300Hz¾Basedonpro

2、ventechnology,widelyusedinsemiconductormanufacturingfabs¾Possibleinputforclosedloopcontrol¾Immunitytobackgroundradiation¾AffordablecostmonitorResultsfromrealproductionlineTexturingProcess(HF/HNO3)Monitoring[AU]1940019350VTrendsrecognitionbetweenwaferbatchesCellsfromcassett

3、e#11930019250andwithinindividualbatches1920019150VDifferentiationinreflectivitybetweenwafers19100Cellsfromcassette#219050originatingindifferentcassettes1900018950189009:5710:0010:0310:0610:09time10:12