扩散工艺研究

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1、实验方案1：在相同时间（1500s）不同温度下的扩散工艺1、理论方案diffusionrecipesTimetemplefttempmidtemprightsourceN2mainN2024208508508500250000600860860860025000090086086387002500030001500860863870180025000300051ohm/sq18085085085002500030004208508508500250000TimetemplefttempmidtemprightsourceN2mainN20242085

2、08508500250000600860860860025000090086086387002500030001500863866873180025000300045ohm/sq18085085085002500030004208508508500250000TimetemplefttempmidtemprightsourceN2mainN2024208508508500250000600857860860025000090085786086702500030001500857860867180025000300055ohm/sq1808508508

3、5002500030004208508508500250000TimetemplefttempmidtemprightsourceN2mainN2024208508508500250000600854857860025000090085485786402500030001500854857864180025000300060ohm/sq18085085085002500030004208508508500250000TimetcmplefttempmidtemprightsourceN2mainN202420850850850025000060085

4、1854860(857)0250000900851854861(857)02500030001500851854861(857)180025000300065ohm/sq180850850850025000300042085085085002500002、实际工艺数据1500s不同温度下的扩散方阻组号温度方阻1方阻2方阻3方阻4方阻5平均权加平均值1860、863、87044.1545.0546.345.0542.344.5743.642.4544.4544.142.143.3445.3647.645.5546.2547.142.4545.7948.

5、144.245.647.5547.8546.6646.7543.946.549.1545.946.442857、860、86748.949.251.348.351.6549.8752.150.552.15450.151.7652.6548.8553.1554.7550.0551.8952.3849.549.054&655051.1549.6756.452.7554.7557.4555.9555.465652.855.15&2556.155.653854、857、86449.749.1552.850.2549.450.2654.0549.4547.55

6、52.854.9551.7651.6550.151.751.449.7550.9256.5554.456.354.952.1554.8654.2359.4585&755.958.6558.1360.6557.8461.4559.5557.859.4584850、854、86773.775.165.6571.272.9571.7269.669.36663.471.5567.9762.95&260.9562.1561.461.1263.9360.0559.960.661.4563.1561.0365.5560.7562.464.9564.263.5758

7、57.7559.4556.8595&23、IV测试结果（1）T1温度数据序号F.F.(%)Eff.(%)而积(cm2)温度(°C)Isc(A)Voc(V)Pm(W)Ipm(A)Vpm(V)Rs（毫欧姆）Rsh（欧姆）21476.6817.20154.83023.55.4960.6322.6625.0900.52410.54165.95521574.0216.45154.83023.65.4760.6282.5474.9390.51610.87342.94721674.1316.58154.83023.55.5050.6292.5674.9550.51

8、910.47885.42021773.5616.51154.83023.65.5140.6302.5564.