SEMI E89-0999 GUIDE FOR MEASUREMENT SYSTEM CAPABILITY ANALYSIS

SEMI E89-0999 GUIDE FOR MEASUREMENT SYSTEM CAPABILITY ANALYSIS

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1、SEMIE89-0999GUIDEFORMEASUREMENTSYSTEMCAPABILITYANALYSISThisguidewastechnicallyapprovedbytheGlobalMetricsCommitteeandisthedirectresponsibilityoftheNorthAmericanMetricsCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeonApril15,1999.InitiallyavailableonSEMI

2、OnLineAugust1999;tobepublishedSeptember1999.11Purpose3.2ISOStandards1.1ThepurposeofthisguideistoprovideaconsistentGuidetotheExpressionofUncertaintyinMeasurementsetofterminologyanddescribeaconstructiveInternationalVocabularyofBasicandGeneralTermsexperimentalapproachtoplanningandcar

3、ryingoutainMetrology,SecondEditionmeasurementsystemcapabilityanalysis.NOTE1:Aslistedorrevised,alldocumentscitedshallbethelatestpublicationsofadoptedstandards.2Scope2.1Primaryfocusisondescribingandestimating4Terminologymeasurementuncertaintyassociatedwiththebehaviorofautomatedwafer

4、measurementsystemsundernormal4.1GeneralDefinitionsoperatingconditions,butthedefinitionsandaccuracy—closenessofagreementbetweenamethodologiesareextendibletomanyothermeasurementmadeonanobjectanditstruevaluemeasurementsituationsinvolvingitemssuchaswafers,[InternationalVocabularyofBas

5、icandGeneralTermsdies,packageddevices,flatpaneldisplays,pieceparts,inMetrology].etc.Whileexamplesareincludedtoillustrateconcepts,NOTE2:Thisisaqualitativetermmeasuredbybias.theintentistoavoidspecificmeasurementsituationdetailswhereverpossibleandfocusinsteadongeneralbias—thedifferen

6、cebetweentheaverageofplanningandanalysisissues.measurementsmadeonthesameobjectanditstruevalue.Sufficientmeasurementsareneededtomitigate2.2Thisguidedoesnotaddressthoseaspectsoftheeffectsofvariability.measurementuncertaintyassociatedwithchangeintheobjectbeingmeasured,eitherspatially

7、ortemporally.NOTE3:Inmanycasesthetruevalueisunknown.Avalueestablishedbyreferenceinstrumentsoraconsensusvalue2.3Thisguidedoesnotaddressthoseaspectsofmightbeusedasasubstitute.measurementuncertaintyassociatedwithcalibrationofthemeasurementsystem.capability(Cp)—adimensionlessfigureofm

8、eritthatindicateshowmanytimeslarg

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