SEMI E89-0999 GUIDE FOR MEASUREMENT SYSTEM CAPABILITY ANALYSIS

《SEMI E89-0999 GUIDE FOR MEASUREMENT SYSTEM CAPABILITY ANALYSIS》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、SEMIE89-0999GUIDEFORMEASUREMENTSYSTEMCAPABILITYANALYSISThisguidewastechnicallyapprovedbytheGlobalMetricsCommitteeandisthedirectresponsibilityoftheNorthAmericanMetricsCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommitteeonApril15,1999.InitiallyavailableonSEMI

2、OnLineAugust1999;tobepublishedSeptember1999.11Purpose3.2ISOStandards1.1ThepurposeofthisguideistoprovideaconsistentGuidetotheExpressionofUncertaintyinMeasurementsetofterminologyanddescribeaconstructiveInternationalVocabularyofBasicandGeneralTermsexperimentalapproachtoplanningandcar

3、ryingoutainMetrology,SecondEditionmeasurementsystemcapabilityanalysis.NOTE1:Aslistedorrevised,alldocumentscitedshallbethelatestpublicationsofadoptedstandards.2Scope2.1Primaryfocusisondescribingandestimating4Terminologymeasurementuncertaintyassociatedwiththebehaviorofautomatedwafer

4、measurementsystemsundernormal4.1GeneralDefinitionsoperatingconditions,butthedefinitionsandaccuracy—closenessofagreementbetweenamethodologiesareextendibletomanyothermeasurementmadeonanobjectanditstruevaluemeasurementsituationsinvolvingitemssuchaswafers,[InternationalVocabularyofBas

5、icandGeneralTermsdies,packageddevices,flatpaneldisplays,pieceparts,inMetrology].etc.Whileexamplesareincludedtoillustrateconcepts,NOTE2:Thisisaqualitativetermmeasuredbybias.theintentistoavoidspecificmeasurementsituationdetailswhereverpossibleandfocusinsteadongeneralbias—thedifferen

6、cebetweentheaverageofplanningandanalysisissues.measurementsmadeonthesameobjectanditstruevalue.Sufficientmeasurementsareneededtomitigate2.2Thisguidedoesnotaddressthoseaspectsoftheeffectsofvariability.measurementuncertaintyassociatedwithchangeintheobjectbeingmeasured,eitherspatially

7、ortemporally.NOTE3:Inmanycasesthetruevalueisunknown.Avalueestablishedbyreferenceinstrumentsoraconsensusvalue2.3Thisguidedoesnotaddressthoseaspectsofmightbeusedasasubstitute.measurementuncertaintyassociatedwithcalibrationofthemeasurementsystem.capability(Cp)—adimensionlessfigureofm

8、eritthatindicateshowmanytimeslarg