HENEECKE技术规格以及安装要求

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1、Systemconfigurationandspec系统配置和技术指标1.Systemconfiguration2.TechnicalSpecificationWaferMeasuring-andSortingSystemHe-WI-04技术指标：硅片测量和分选系统He-WI-04Objectives目的Thesystemisdesignedforthefinalinspectionandsortingofsolarwafers.Itcanmeasurerectangularwafers(monoandmulti)between125mman

2、d156mminlength.Thethicknessofthewafersshallbe0.12mm–0.4mm.Afterareconstructionthesystemcanalsomeasurewaferswiththedimension210mmx210mm.Thefollowingaccuracyisspecifiedforwaferswiththedimensionof156mmx156mm.该系统的功能是对硅片进行最终的测试和分选。其可以测量方形的单晶和多晶硅片,尺寸125毫米和156毫米之间，硅片的厚度在0.12毫米和0.4

3、毫米之间。在重新配置系统后,其也可以测试210毫米x210毫米的硅片。以下的指标是针对156毫米x156毫米的硅片。GeneralEquipmentCriteria:设备总体要求：Applicationforwafersize125x125or156x156ofMulti/Monoproduct;Orthemachinealsoavailableforthesizeof210X210afterre-configuration;可以用125x125至156x156多种尺寸的单晶或多晶硅片，或者在重新配置系统后测试210X210的硅片。Throu

4、ghput:产量为≥3,000pcs/hBreakagerate碎片率：≤0.2%Uptime设备开机率：≥95%Cassettetype片架类型：25pcsor100pcsMeasuringSystem测量系统Themeasuringsystemconsistsofthefollowingmodules:该测量系统有以下模块组成:1Thicknessmeasuringsystem厚度测量模块Edgedefectdetectionmeasuringsystem边缘缺陷测试模块ExternalDimensionsandPerpendicular

5、measurementsystem外形尺寸测量模块SoriMeasurementSystem(neartoWarp,Bow)翘曲度测量模块Sawmarkmeasurementsystem线痕测量模块Centralprocessingunit中央处理单元Option:NonVisualCrackdetection–MicroCrackandSICinclusion可选:微裂痕和碳化硅杂质测试模块Option:Staindetection可选:污点测试模块Option:Resistivity可选:电阻率测试模块2.1Thicknessmeasur

6、ingsystem2.1厚度测量模块Thethicknessismeasuredwithcapacitivesensorsforthreedifferentsizesofwafer.Onpassingthroughthesystem,thewaferthicknessandTTVismeasuredatdifferentpointsalongthreemeasuringtracks.Thedatawillbetransferredtothecentralcomputer.硅片的厚度是通过电容传感器测试硅片上三处不同路径获得的。硅片通过系统时,

7、沿着硅片中间,左侧,右侧的三处不同路径，厚度和厚度变化被持续地取点进行测试。数据会传到电脑的中央处理器。Thethicknessmeasurementtracksarearrangedasfollows:厚度测量路径是如以下安排的:Thesystemconsistsof3measuringsensorspairs,1middlelineandtwolinesforthedifferentsizes.Thetwoouterlinesaremountedonanautomatedaxis,sothatthesystemcanadjusttheou

8、terlinesforeachdimensionbetween125mm-210mmautomatically.该系统配有三副测试传感器,硅片的中间，左侧，和右侧。