TSO 14644-1 洁净室及相关控制环境（英文）

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1、INTERNATIONALISOSTANDARD14644-1Firstedition1999-05-01Cleanroomsandassociatedcontrolledenvironments—Part1:ClassificationofaircleanlinessSallespropresetenvironnementsmaîtrisésapparentés—Partie1:Classificationdelapropretédel'airAReferencenumber--`,,`,-`-`,,`,,`,`,,`---ISO14644-1:1999(E)Co

2、pyrightInternationalOrganizationforStandardizationProvidedbyIHSunderlicensewithISONoreproductionornetworkingpermittedwithoutlicensefromIHSNotforResaleISO14644-1:1999(E)©ISOContentsPageForeword..............................................................................................

3、...........iiiIntroduction.....................................................................................................iv1Scope........................................................................................................12Definitions..................................

4、................................................................13Classification.............................................................................................34Demonstrationofcompliance....................................................................4AnnexesAnnexA(inf

5、ormative)GraphicalillustrationoftheclassesofTable1............5AnnexB(normative)Determinationofparticulatecleanlinessclassificationusingadiscrete-particle-counting,light-scatteringinstrument......6AnnexC(normative)Statisticaltreatmentofparticleconcentrationdata.....9AnnexD(informative)

6、Workedexamplesofclassificationcalculations........10AnnexE(informative)Considerationsforthecountingandsizingofparticlesoutsidethesizerangeapplicableforclassification.....................13AnnexF(informative)Sequentialsamplingprocedure................................15Bibliography......

7、.............................................................................................18FiguresFigureA.1GraphicalrepresentationofISO-classconcentrationlimitsforselectedISOclasses...............................................................5FigureF.1Boundariesforpassorfailbyt