高动态运动平台全局耦合建模与特性分析及控制分析

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1、得到了一种时间及距离都受约束情况下的非对称S速度规划曲线，同时使用逐段补偿的方式处理计算机实现时的离散化问题。在控制器设计方面，首先分析了高动态运动平台控制系统的特点，然后设计了一种速度环、位置环双环反馈加前馈控制，并结合干扰补偿的控制器。速度环采用鲁棒Hs控制实现对参数不确定性及干扰的抑制；位置环采用PID控制实现对运动轨迹的跟踪；零相误差跟踪控制用来进一步提高轨迹跟踪精度并补偿系统滞后影响；对非线性摩擦干扰采用基于模型的补偿方式。最后搭建了实验系统，对高动态运动平台进行性能测试及实验研究。性能测试结果表明运动平台能够实现最大加速度

2、15go实验结果表明所提出的非对称速度规划曲线具有抑振效果，结合设计的控制器使平台实现±2-±3Mm定位精度，这些指标已经达到目前国外封装设备中对高动态平台的要求。本文的工作为后续研究此类高动态运动平台提供了理论和技术支撑。尖键词：高动态运动平台；直线电机；键合图；非对称速度规划；鲁棒Hoo控制；零相误差跟踪AbstractChippackagingplaysanimportantroleinICindustrychain.Highdynamicmotionstageisoneofthecoretechnologiesinchippa

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8、uplingsystemmodeling,analyzingthecharacteristics,usingthespecificasymmetricStrajectoryplanningmethod,andthende