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1、AbstractForprecisionmotionstagesisacomplexsystem,whichincludesmechanical,electromagnetic,controlandothersubsystems,themulti-domainmodelingandsimulationhasbecomeanimportantmethodofinnovativedesignandperformanceanalysis.Modelicaisanewgenerationofunifiedmodelinglanguageforthiskindofmulti-domainphy
2、sicalsystem.Ashydrostaticairbearingissupportingandguidingpart,itsfeaturesdeterminethedynamiccharactristicsofprecisionmotionstage.Previousmodelingmethodofhydrostaticairbearinghasmadesimplificationindefierentdegree,thiscannotsatisfythedemandsofmoreandmoreaccuratemodeling.ThispaperisfundedbytheNat
3、ionalMinistryofScienceandTechnologyMajorProject.Forthesystemofprecisionmotionstages,focuseonthemulti-domaincouplingfeaturesandthenonlinearmodelofthehydrostaticairbearing,Thepaperhasestablishedmulti-domainmodelofprecisionmotionstage.Themaincontributionsofthepaperarcasfollows:Firstly,basedonthean
4、alysisofkeymodelingmechanismofModelica,andthedificienciesofpreviousequivalentmedelingmethodofairbearing,thesolutionofjointsimulationmethodisproposed・AndthenbasedontheWinsocknetworkcommunicationfunction,theDymola/Simulink/Fluentjointsimulationmethodwasbuild,whichprovidedthesoftwareframeworkforth
5、ebelow.Secondly,introducethemodelingmethodofeachpartofprecisionmotionstage,includingairbearingmodel,theelectromagneticdrivemodel,themulti-bodymodel.Especially,themodelingofairbearinghasbeenemphasised,whichincludesModelicainterfacemodelandFluentflowfieldmodel.Thismodelingmethodhascombinedtheadva
6、ntagesofModelicaandCFDsimulation,sotheprecisionmodelofairbearingloadandposturehasbeedbulit.Finally,withthemulti-domainmodelofprecisionmotionstage,theeflectionerrorhasbeenanalyzed,andthesimulationresultsshowthatboththeoutofsyncofbilateraldrivemotorandslidemotionarethemaincauseofdeflectiontorque,
7、makingthestagedeflectelargely.Sothestmeturemustbeoptimized,andthesetwofactorsmustbecontroledinthecontrolsystem・Keywords:Multi-domainmodeling;Modelica;eflectionerroranalysis;airbearings;precisionmotionstage;目录摘耍IAbstractII1.绪论11.1课
