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1、AppliedPhysics应用物理,2016,6(12),273-280PublishedOnlineDecember2016inHans.http://www.hanspub.org/journal/apphttp://dx.doi.org/10.12677/app.2016.612034APolarizingBeamSplitterBasedonMicro-NanoMulti-SubpartsResonantGratingHuamingWu1,2*,WenboXiao1,2,XianshuangLiu1,2,Y
2、ongshengXiao3,LizhenHuang3,LinfeiMa1,2,YuexiaDing1,2,JingZeng1,21NationalEngineeringLaboratoryforNon-DestructiveTestingandOptoelectronicSensingTechnologyandApplications,KeyLaboratoryofNon-DestructiveTesting,MinistryofEducation,NanchangJiangxi2JiangxiEngineering
3、LaboratoryforOptoelectronicsTestingTechnology,SchoolofMeasuringandOpticalEngineering,NanchangHangkongUniversity,NanchangJiangxi3SchoolofInformationEngineering,NanchangHangkongUniversity,NanchangJiangxithththReceived:Nov.28,2016;accepted:Dec.13,2016;published:De
4、c.16,2016Copyright©2016byauthorsandHansPublishersInc.ThisworkislicensedundertheCreativeCommonsAttributionInternationalLicense(CCBY).http://creativecommons.org/licenses/by/4.0/OpenAccessAbstractDuetothedifferentdiffractionpropertiesofgratingsforTEandTMpolarizedw
5、ave,inthisstudy,usingthesiliconbasedmicro-nanomulti-subpartsresonantgrating,weproposeahighperfor-mancepolarizingbeamsplitter(PBS).ThepropertiesofthegratingPBSareinvestigatedbyri-gorouscoupled-waveanalysis.Itisshownthat,overabroadbandspectrumof1.53~1.62μm(C+Lban
6、d),thegratingPBSdemonstrateshighdiffractionefficiency(>97%)withextinctionratio(ER)greaterthan16dBandacomparativelywideangularbandwidth(about8˚).EffectsofdeviationfromthedesignparametersontheperformanceofthegratingPBSarealsopresented.KeywordsDiffractionandGratin
7、gs,PolarizingBeamSplitters(PBSs),Leaky-ModeResonance(LMR)微纳多齿谐振光栅偏振分束器的研究1,2*1,21,2331,21,21,2吴华明，肖文波，刘宪爽，肖永生，黄丽贞，马林飞，丁月霞，曾静*通讯作者。文章引用:吴华明,肖文波,刘宪爽,肖永生,黄丽贞,马林飞,丁月霞,曾静.微纳多齿谐振光栅偏振分束器的研究[J].应用物理,2016,6(12):273-280.http://dx.doi.org/10.12677/app.2016.612034吴华明等1无损检测
8、与光电传感技术及应用国家地方联合工程实验室、无损检测技术教育部重点实验室，江西南昌2江西省光电检测技术工程实验室、南昌航空大学测试与光电工程学院，江西南昌3南昌航空大学信息工程学院，江西南昌收稿日期：2016年11月28日；录用日期：2016年12月13日；发布日期：2016年12月16日摘要由于光栅对于TE和TM偏振光表现出不同的衍射性质，据
