Welch_Luxtera_OIDASilicon11英文文献资料

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1、CMOSPhotonicsforTerabitInterconnectsOIDA2011Overview•CMOSPhotonicsTechnologyOverview•IndustryTrendsandProjections–Exascalesupercomputers•CMOSPhotonicsTechnologyScaling–Highspeedserialsignaling–PowerScaling–HighDensityEncoding–WDM•CMOSPhotonicIntegration–Powerandc

2、ostsavings•SolutionsforTerabitinterconnects–ParallelInterconnects–SerialInterconnectsCMOSPhotonicsTECHNOLOGYOVERVIEWCMOSPhotonicsTechnologySummaryBasicTechnology:–Integrationofphotonicandelectronicfunctionsononedie(lowcost)–Manufacturedusingstandardtoolsinmainstr

3、eamCMOSfabLux-Gprocess:–BasedonFreescaleSemiconductor130nmSOICMOSnode–ProcessreliabilityqualifiedperJEDEC001–Since2008infullmanufacturingmode(maturitylevel3)IntegratedfunctionsonCMOSdie:–Electroniccircuits–Passiveandactivewaveguidedevices–Couplingstructures–Photo

4、-detectorsFullyintegrated,Cadencebaseddesignenvironment:–Devicelibrarieswithbehavioralandstatisticalmodels–Layoutautomation4x10Gb/sTransceiverIC–LVS&DRCextendedtophotonicdevices–Extendedelectro-opticalsystemsimulationcapabilitiesPhotonicallyEnabledCMOSProcessTech

5、nologyLUX-GCMOSProcess:–BasedonFreescaleSemiconductor’sHIP7SOI(PowerPCTMmicroprocessorsandmicrocontrollers):SOI8”Wafer–0.13μm(193nmlithography)CMOSSOITechnology–Luxterahasdevelopedanextensivelibraryofphotonicandelectronicblocks“Photonically-enabled”CMOSSOIprocess

6、:Processmodulesaddedforphotonics:–Shallowtrenchetchforthedefinitionofwaveguidesandgratingcouplers–SelectivegrowthofGermaniumislandsforphoto-detectorintegration–AllprocessesandtoolsarestandardandfullycompatiblewithCMOSCMOSOpticalComponentsandLibrariesCross-section

7、singleSingleModeSiliconwaveguides:modewaveguide–SOIandetchedtrenchesforrespectivelyverticalandhorizontallightconfinement–Smallmodesize->smallbendingradii->compactphotonicICsMultiMode–Demonstratedlosses<0.1dB/cmLibraryofpassivewaveguidestructuresWaveguideY-junctio

8、nDirectionalCoupler:–TerminationTerminationLowloss50%splittertunablesplittingratio–Splitters–DirectionalcouplersLibraryoffiber-to-the-chipcouplers–Singleandpol