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1、FundamentalsofSiliconPhotonicDevicesB.ThomasSmith,DazengFeng,HongbingLei,DaweiZheng,JoanFong,andMehdiAsghari.Main:626-236-4500,email:tsmith@kotura.comKotura,Inc.,2630CorporatePlace,MontereyPark,CA.91754,USAThispaperoffersabriefintroductiontosiliconphotonicsincludingthebasicopticalwaveguide,pa
2、ssiveopticalcircuitperformance,theadditionofdopedp-andn-junctionsadjacenttotheintrinsicsiliconwaveguidetoinjectacurrentacrossthewaveguide,free-carrierdispersion,performanceofthevariableopticalattenuator(VOA),andamonolithic,dual-functionsplitter-VOAarraycircuit.Keywords:silicon,photonic,electr
3、onic,optical,attenuator,PLC,VOA1.INTRODUCTIONTheuseofsiliconhaslongbeenestablishedforinfraredoptics,suchassimplelensesandwindowsandlong-wavedetection.Today(in2006)siliconisthematerialofchoiceforvisibledetection,particularlyastheimagingelementindigitalcameras.Insomecommercialcameras,thewavelen
4、gthresponseofsiliconhasevenbeenextendedtothenearinfrared(to1,100nm).Inaddition,thevastexpertbaseinsiliconmaterials,devicephysics,andprocessingequipmentthathasbeendevelopedforelectronicmicrocircuits,layinwaitingtoaddresstherapidgrowthofthefiberopticinfrastructureforthetransportofinformation,vi
5、deo,andvoice.Thereisnodoubtabouttheeconomicandtechnicaladvantagesofsiliconanditwasinevitablethatsiliconwouldbeemployedwhereveropticfiberisdeployed.Predictably,withtheriseinInternetanddatatransmission,theneedforhigherspeed,broaderbands,andlowercostmatchesallfourofthematerialbenefitsprovidedbys
6、ilicon:oPhotonic:widebandinfraredtransparency,oElectronic:lownoise,highspeedintegratedcircuits,oThermal:highheatconductance,andoStructural:rugged3-dimensionalplatformsandpackages.Thesematerialpropertiesmakepossibleawiderangeofintegratedelectronicandphotoniccircuits.12Reviewsofthesiliconpotent
7、ialarefoundinarecentarticlebyLipsonandJalali.Thispaperwillfocusoncurrentandnear-termproductsincludingthefirstsiliconelectro-photoniccommercialdevice-theelectricallyvariableopticalattenuatororVOA-andexplainthebasicconstruction,operatingprincip
