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ID:40477610
大小:49.51 KB
页数:13页
时间:2019-08-03
《镀膜真空术语全集(中英文对照)》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、镀膜真空术语全集(中英文对照)5.分压真空计(分压分析器)5-1.射频质谱仪radiofrequencymassspectrometer: 5-2.四极质谱仪(四级滤质器)quadrupolemassspectrometer;quadrupolemassfiler: 5-3.单极质谱仪momopolemassspectrometer:5-4.双聚焦质谱仪doublefocusingmassspectrometer: 5-5.磁偏转质谱仪magneticdeflectionmassspectrometer
2、: 5-6.余摆线聚焦质谱仪trochoidalfocusingmassspectrometer: 5-7.回旋质谱仪omegatronmassspectrometer: 5-8.飞行时间质谱仪timeofflightmassspectrometer: 6.真空计校准6-1.标准真空计referencegauges: 6-2.校准系统systemofcalibration: 6-3.校准系数Kcalibrationcoefficient: 6-4.压缩计法meleodgaugemethod:
3、6-5.膨胀法expansionmethod: 6-6.流导法flowmethod:4. 1.真空系统vacuumsystem 1-1.真空机组pumpsystem: 1-2.有油真空机组pumpsystemusedoil: 1-3.无油真空机组oilfreepumpsystem1-4.连续处理真空设备continuoustreatmentvacuumplant: 1-5.闸门式真空系统vacuumsystemwithanair-lock: 1-6.压差真空系统differentiallypum
4、pedvacuumsystem: 1-7.进气系统gasadmittancesystem: 2.真空系统特性参量2-1.抽气装置的抽速volumeflowrateofapumpingunit: 2-2.抽气装置的抽气量throughputofapumpingunit: 2-3.真空系统的放气速率degassing(outgassing)throughputofavacuumsystem: 2-4.真空系统的漏气速率leakthroughputofavacuumsystem: 2-5.真空容器的升压
5、速率rateofpressureriseofavacuumchamber: 2-6.极限压力ultimatepressure: 2-7.残余压力residualpressure: 2-8.残余气体谱residualgasspectrum: 2-9.基础压力basepressure: 2-10.工作压力workingpressure: 2-11.粗抽时间roughingtime: 2-12.抽气时间pump-downtime:2-13.真空系统时间常数timeconstantofavacuumsy
6、stem: 2-14.真空系统进气时间ventingtime: 3.真空容器3-1.真空容器;真空室vacuumchamber: 3-2.封离真空装置sealedvacuumdevice: 3-3.真空钟罩vacuumbelljar: 3-4.真空容器底板vacuumbaseplate: 3-5.真空岐管vacuummanifold: 3-6.前级真空容器(贮气罐)backingreservoir: 3-7.真空保护层outerchamber: 3-8.真空闸室vacuumairlock:
7、 3-9.真空冷凝器;蒸汽冷凝器deviceforcondensingvapor: 4.真空封接和真空引入线4-1.永久性真空封接permanentseal: 4.2.玻璃分级过渡封接gradedseal: 4-3.压缩玻璃金属封接***pressionglass-to-metalseal: 4-4.匹配式玻璃金属封接matchedglass-to-metalseal: 4-5.陶瓷金属封接ceramic-to-metalseal: 4-6.半永久性真空封接semi-permanentseal:
8、 4-7.可拆卸的真空封接demountablejoint: 4-8.液体真空封接liquidseal 4-9.熔融金属真空封接moltenmetalseal: 4-10.研磨面搭接封接groundandlappedseal: 4-11.真空法兰连接vacuumflangeconnection: 4-12.真空密封垫vacuum-tightgasket: 4-13.真空密封圈ringga
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