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1、CIRPAnnals-ManufacturingTechnology59(2010)652–671ContentslistsavailableatScienceDirectCIRPAnnals-ManufacturingTechnologyjournalhomepage:http://ees.elsevier.com/cirp/default.aspUltra-precisiongrindinga,*,Y.Mutlugu¨nesabcdeE.Brinksmeier(1),F.Klocke(1),J.C.Aurich(1),P.
2、Shore(2),H.Ohmori(2)aUniversityofBremen,LaboratoryforPrecisionMachining(LFM),GermanybRWTHAachenUniversity,LaboratoryforMachineToolsandProductionEngineering(WZL),GermanycTechnicalUniversityofKaiserslautern,InstituteforManufacturingEngineeringandProductionManagement(F
3、BK),GermanydCranfieldUniversity,SchoolofAppliedSciences,England,UKeTheInstituteofPhysicalandChemicalResearch(RIKEN),JapanARTICLEINFOABSTRACTKeywords:Ultra-precisiongrindingisprimarilyusedtogeneratehighqualityandfunctionalpartsusuallymadeUltra-precisionfromhardanddiffi
4、culttomachinematerials.Theobjectiveofultra-precisiongrindingistogeneratepartsGrindingwithhighsurfacefinish,highformaccuracyandsurfaceintegrityfortheelectronicandopticalindustriesFinishingaswellasforastronomicalapplications.Thiskeynotepaperintroducesgeneralaspectsoful
5、tra-precisiongrindingtechniquesandpointouttheessentialfeaturesofultra-precisiongrinding.Inparticular,thekeynotepaperreviewsthestate-of-the-artregardingappliedgrindingtools,ultra-precisionmachinetoolsandgrindingprocesses.Finally,selectedexamplesofadvancedultra-precis
6、iongrindingprocessesarepresented.ß2010CIRP.1.IntroductionHowever,sinceultra-precisiongrindingcoversawiderangeofapplications,everypieceofresearchfocusesonaspecifictopic.Thus,Duringthelastdecadesthedemandforhighprecisionpartshasacommonlyacceptedgeneraldefinitionofultra-
7、precisiongrindingstronglyincreased.Suchpartsenteredawiderangeofapplicationsdoesnotexist.Therefore,anattemptismadeinthiskeynotepapertointheoptical,automotive,andcommunicationindustryaswellascharacterizeultra-precisiongrindingandtoworkoutsomegeneralinmedicalandlifesci
8、ences.Ultra-precisionmachiningofnon-aspectsandphysicalprinciplesbeforeconsideringspecificrequire-ferrousmetalscanreliablybeachievedbyprecis
