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1、J,Am.Ceram.Soc..74141697-708(1991)HumiditySensorsBernardM.Kulwicki*TexasInstrumentslncorporaited,Attleboro,Massachusetts02703Humiditysensortechnologiesporesandgrainboundariesofporousamenabletowidespreadapplicationsemiconductorssuchascertainmodi-inelectroniccontrolsystemsarere-fiedspinelsoralu
2、mina.Theinternalviewed.Theprincipalsensorgroupssurfaceconductionincreaseswithhu-ofinterestincluderesistiveceramics,midity.However,theinternalsurfacesdielectricpolymers,andresistivecanbecomesemipermanentlychangedpolyelectrolytes.Thephysicalmecha-duringprolongedexposuretohumidnismsandapplicatio
3、ntrade-offsforatmosphereorcontaminantssuchaseachgroupareconsidered.Stabilityoilvapororsmoke.Anintegralheaterofsensorresponseisaprimarycon-isfrequentlyrequiredtoperiodicallyre-cern.Atthepresenttimenosinglegenerateceramicsensorsandrecoverdesignoptioncanbeconsideredtothehumidity-sensitivepropert
4、iesthatbeuniversallyapplicable.[Keywords:characterizethevirginsensor.Thishumidity,sensors,controls,dielectricaddscomplexityandcost.Devicesmaterials,polyelectrolytes.]withoutheatersareusefulinlow-humidityapplicationsorreasonablycleanenvironments.However,somemayrequireperiodicrecalibration.1.In
5、troductionPolymericsensorscanbelowerinHUMIDITYsensingisbecomingevercostthantheirceramiccounterparts,moreimportant,principallyincontrolsincehigh-temperatureprocessingandsystemsforindustrialprocessesandheatcleaningarenotrequired.Therehumancomfort.Awidevarietyofce-aretwomaintypesofpolymericsen-r
6、amic,polymeric,andcompositesen-sors:capacitivesensorsusethin-filmsorsarebeingproducedtoservecelluloseestersorpolyimideresinsastheseapplications.Eachofthesetypeshumidity-dependentdielectrics,andre-ofsensorshaslimitations,andnewsistivesensorsusepolyelectrolytessensorconceptscontinuetoemerge.tha
7、texhibithumidity-dependentacre-Existingandproposedtechnologiessistivity.Polymericsensorsarebulk-aredescribedinthispaper,butem-effectdevicesandassuchtendtobephasiswillbeontheformer.Addition-lesssensitivetocontaminationthantheally,thediscussion
