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1、200310/31・UF3000MaintenanceGuide(Summary)TOKYOSEIMITSUCo.,Ltd.ACCRETECH*HeidenhainlinearscaleX,Yaxismonitorjig:PWT18NooscilloscopenecessaryZaxismonitorjig:PWT17NooscilloscopenecessaryTomonitorlinearscalewaveform,PoweroffUF3000,andthenconnectPWTmonitorj
2、ig,movethemotorwithhand.X,Yaxis:OUTPUTvoltage０．８～１．２Vrange,TooptimizetheoutputVoltage,Adjusttheclearancebetweenreadingheadandscale.Zaxis;9～13μＡHeadclearanceX,Y=0．5ｍｍZ＝0．75ｍｍClearanceadjustment;usespecialfilm*MonitordisplayMovethemotor,Signalmuststayins
3、ideoftheflameZphase(X,Yaxisnouse)Phaseadjustment;HeadtilingTheX,YLinearscaleis4micronpitch,dividedsignalinto40.X,Yresolution0.1μｍ、InputsignaltoservodriverCN2Zresolution0.5μｍ*XYaxisSerialdataoutputAMPSerialI/FtoservodriverHeadUnitserialI/FunitLIF181AMPM
4、itsu01*Z軸TTLsignalAMPoutputtoZdriverHeadUnitTomakethescaleparallel,Setthescaletomechanicaldeadendposition.Headclearanceandangleareadjustable.(ClearanceX,Y0.5mm,Z0.75mm)Zmotorhasnoencorder,ZaxissoftwareoriginalpointisleanerscaleZphase.2*UF3000transporta
5、tion;UndockingLoaderunitWhenshippingUF3000,Undockingbetweenmainbodyandloaderunit.Undocking：Loaderpowerunit,airunitsticktomainbody.DisconnectOCRcable,CCDcameracable,powercablebetweenmainbodyandloader.DisconnectloaderairandvacuumhoseTakeoffthepowercablef
6、romloaderpowerterminal(4P).DisconnectARCnet(CN1)cable,DC12V(J1orTB5-2,3)cablefromloaderCPU.DisconnectalarmpoleconnectorCN150.3*SetupInstallpowerunitandairunit.*Baseplate3fixedscrewsand2supportscrews（Itisnotnecessarytomakebaseplatescrewspacerupsidedownw
7、hensettingupUF3000.）Thetwosupportscrewsarelocatedatrearsideofbaseplate.Makethesescrewfloating,donotpressbaseplate.*ChuckplanarityHeightadjustablespacerFixedspacerXbaseチャックChuckToadjustchucklevel,Useleftsidetwoscrews,Atfirstmaketherightfrontspacerloose.
8、Afterheightadjustmentcompleted,tighttherightfrontscrew.Whentightening3adjustmentscrews,donotmaketheZ-axisplatedistorted.DistortionmakesZ-axisaccuracyworse4Chucklevelspec;Roomtemperatureto100degree:10umTemperature100to150degree:15um*Thet
