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A CRITERION FOR ARREST OF A THREADING DISLOCATION IN A STRAINED EPITAXIAL LAYER DUE TO AN INTERFACE MISFIT DISLOCATION IN ITS PATH

A CRITERION FOR ARREST OF A THREADING DISLOCATION IN A STRAINED EPITAXIAL LAYER DUE TO AN INTERFACE MISFIT DISLOCATION IN ITS PATH

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时间：2019-07-11

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1、AcriterionforarrestofathreadingdislocationinastrainedepitaxiallayerduetoaninterfacemisfitdislocationinitspathL.8.FreundDivisionofEngineering,BrownUniversity,Providence,Rhodebland02912(Received9February1990;acceptedforpublication4May1(90)Inastrainedlayergrownepitaxiall

2、yonasubstrate,themotionofadislocationonanyparticularglideplaneinthelayercanbeinfluencedbythepresenceofdislocationsonotherglideplanes.Thefocushereisontheglideofadislocationextendingfromthefreesurfaceofthelayertothelayer-substrateinterface,theso-canedthreadingdislocatio

3、n.Ageneraldefinitionofdrivingforceforglideofathreadingdislocationinanonuniformstressfieldisadoptedtocalculatethedrivingforceonathreadingdislocationduetoanencounterwithaninterfacemisfitdislocationonanintersectingglideplane.Theresultisexaminedindetailforthecaseofcubicma

4、terials,takingintoaccountdifferentcombinationsofBurgersvectors.TheanalysismakesitclearthatthemisfitdislocationforcesthethreadingdislocationtoglidethroughachannelofwidthlessthanthefuUlayerthickness.Ablockingcriterionisproposed,basedonthepresumptionthatblockingwilloccur

5、ifthechannelwidthislessthanthecriticalthicknessforthelocalreducedstrain.Theresultsindicatethatthiseffectcanbesignificantinblockingtheglideofathreadingdislocation,dependingonthemismatchstrainmagnitudeandthelayerthickness.tINTRODUCTIONsupplyofthreadingdislocationswherea

6、s,inreality,disloca•Theconceptofcriticalthicknessfortheonsetofelastictionsmustbenucleated,aprocesswhichistypicallymorestrainrelaxationinastrainedlayergrownepitaxiallyonadifficulttoactivatethansteadyglideofathreadingdisloca•2substratewasintroducedtwodecadesago.IAlthoug

7、hmanytion.-4Dislocationmobilityinsemiconductormaterialsisvariationsexist,thecentralideaoftheconceptisrelativelyquitelow,sothattherateofelasticstrainrelaxationcanalso57simple.Itisbasedontheassumptionofanisolatedpreexist•belimitedbythekineticsofdislocationmotion.-Yetan•

8、ingdislocationextendingfromthefreesurfaceofthelayerotherpossibleimpedimenttotherelaxationofelasticmis•acrossitsthickness,and

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