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1、SURFACEANDINTERFACEANALYSISSurf.InterfaceAnal.27,600È606(1999)QuantitativeMaterialCharacterizationbyUltrasonicAFMK.Yamanaka,1*A.Noguchi,1T.Tsuji,1T.Koike1andT.Goto21DepartmentofMaterialProcessing,TohokuUniversity,Aoba-yama02,Sendai980-8579,Japan2MitsubishiHeavyIndust
2、ryLtd.,Sachiura1-8-1,Yokohama236,JapanInanatomicforcemicroscopeequippedwithamicromachinedcantilevertip,thecantilevervibrationspectraincontactwiththesamplewerefoundtobestronglydependentontheexcitationpower.However,iftheexcitationpowerissmallenough,theresonancepeakwidt
3、hdecreasesandthepeakfrequencyincreasestoacertainlimitingvalue.Inthisconditionthetip–samplecontactiskeptlinear,andsatisfactoryagreementbetweenthemeasuredandcalculatedfrequencyisobtained,assumingaconstantcontactsti†ness;theagreementisfurtherimprovedbytakingintoaccountt
4、helateralsti†ness.Morequantitativeinformationontheelasticityofthesampleisobtainedfromthecontactloaddependenceofthefrequency,wherecontactsti†nessofanon-sphericaltipshapeisderivedfromtheSneddon–Maugisformulation,andthetipshapeindexisestimatedbyaninverseanalysisoftheloa
5、d–frequencyrelation.Afurtheradvantageofevaluatingnotonlytheverticalbutalsothelateralsti†nessisdemon-stratedonagroundsiliconwaferbysimultaneousmeasurementofdeÑectionandtorsionalvibration.Copyright(1999JohnWiley&Sons,Ltd.KEYWORDS:atomicforcemicroscopy;ultrasonicvibrati
6、on;higherordermodes;contactsti†ness;inverseanalysispiezoelectricvibratordrivenbytheoutputofanetworkINTRODUCTIONanalyser;thevibratingopticalleversignalwasmea-suredbythesamenetworkanalyser.Thelow-frequencyTheresonancefrequencyofcantilevervibrationincomponent(1kHz)ofth
7、ecantileverdeÑectionsignalatomicforcemicroscopy(AFM)1hasbeenprovedtobefromtheopticalleversensorisusedtokeeptheforceausefulmeasureofthetipÈsamplecontactsti†ness.2h7constant,asintheusualcontactmodeAFM1illus-QuantitativeanalysishasbeenperformedwiththetratedinFig.1(a).Wh
8、enresonancevibrationisexcitedboundaryconditionatthetipsideofthecantilever,tothecantilever,elasticdeformationofthesampleistakinginto
