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1、Design,andpreliminarycharacterizationofanovelMEMSbionicvectorhydrophoneHuaMingya(SchoolofmechanicalengineeringandautomationShanghaiUniversity,Shanghai200072,China)Abstract:Accordingtothe principleof thefish laterallineorgan ofhearing, anovelmicroelectromechanicalsystems (MEMS) bionicvectorhydrophon
2、e usedforobtainingvector informationofunderwatersoundfield isintroduced. Itisdesirablethat theapplicationofMEMS piezoresistiveeffect andbionic structurecanimprovethe lowfrequency sensitivity ofvectorhydrophone and itsminiaturization basedon. Bionic structureiscomposedoftwoparts:highprecision four b
3、eamstructureandthe rigid plastic barrelisfixedon themicrostructureofthe center. Haircells locatedinthe lateral line varistors beamsimulation and rigidplasticcylindrical simulation cilia. Whentheplastic tube isbyvoice, strain varistor totransformthe differentialvoltage output signalthroughthe Wheast
4、onebridge circuit. Microfabricationtechniqueshavebeen usedtomeasure tissue results made.Keywords:MEMS;Bionic;Vectorhydrophone;Lowfrequency1.ThecharacteristicsofMEMSMiniature:MEMSdevices hastheadvantagesofsmallvolume, lightweight, lowenergyconsumption, smallinertia, highresonancefrequency, shortresp
5、onsetime.Siliconasthemain material, mechanicalandelectrical propertiesof silicon fine:strength, hardnessandYoung'smodulus and densityof iron, likealuminum, heatconduction rate closetothe molybdenumandtungsten.Massproduction: micromachining with silicon also making hundredsof microelectromechanical
6、deviceora completeMEMS in apieceofsilicon technology.Massproduction cangreatlyreducetheproduction cost.Integration: cantake differentfunctionsand sensitive directionorthe actuatingdirection ofmultiple sensorsoractuators areintegrated, or theformationofmicrosensorarray, microactuator array, eventoth
7、e device ofmultiplefunctions areintegratedtogether, forminga complexmicrosystems. Microsensors, microactuators andmicro integration canproduce reliability, highstability MEMS.2.IntroductionInunderwateracous
