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1、Piezo•Nano•PositioningMicropositioningStages&ActuatorsHexapod6-AxisPositioningSystems09/2005translationstage,rotaryactuator,six-axisnanopositioningsystem,linearstage,linearactuator,hexapod,precisionstage,ContentsHexapods/MicropositioningContents................
2、............................................7-2Micropositioning/HexapodSystems.....................................7-4MicropositioningSystems,Experience....................................7-6SelectionGuideHexapods,TranslationStages,RotationStages,VerticalStages
3、..7-8MicropositioningFundamentals........................................7-11MicropositioningorNanopositioning....................................7-11TestingEquipment...................................................7-11DefinitionofAxesandAngles...............
4、...........................7-12Glossary...........................................................7-12GuidingTechniques..................................................7-15MotorsandDriveSystems.............................................7-16HexapodsF-206.SHex
5、Align™6-AxisPrecisionAlignmentSystem/Manipulator(Hexapod)...7-18M-850Hexapod6-Axis-ParallelKinematicsMicrorobot......................7-20M-840HexaLight™6-Axis-ParallelKinematicsMicrorobot....................7-22M-824Compact6-AxisParallelKinematicsMicrorobot....
6、..................7-24VoiceCoilScannersV-106Voice-CoilScanningSystem.......................................7-26Micro-Stages,to25mmTravel(Motorized/Manual,PiezoOption)M-311-M-318SeriesofMiniatureTranslationStages.......................7-28M-105,M-106TranslationS
7、tageswithCrossedRollerBearings................7-30M-011Ultra-High-Precision,Side-DriveStageswithMagnetic-KinematicBearings...7-32M-014Ultra-High-Precision,Side-DriveStageswithMagnetic-KinematicBearings...7-34M-110.1,M-111.1,M-112.1High-ResolutionMicro-Translati
8、onStages...........7-36M-110.2,M-111.2,M-112.2High-ResolutionMicro-TranslationStageswithBallscrewDrive..................................................7-38M-126TranslationS
