氧化镓籽晶层的制备与其对外延生长氧化镓薄膜的影响

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1、氧化镓籽晶层的制备及其对外延生长氧化镓薄膜的影响PreparationofGa203seedlayeranditsinfluenceontheepitaxialgrowthofGa203filmsAbstractWiththerapiddevelopmentofoptoelectronicsemiconductortechnology,moreandmorepeoplegetinfavorofthebroadbandgapsemiconductormaterials．Galliumoxide(Ga203)isakindo

2、fbroadbandgapsemiconductormaterialofIII—VIgroups．Thep-Ga203isthemoststabletypeinthesefiveisomers．ThedirectbandgapofGa203iswide(4．2eV-4．9eV)，andithasgoodchemicalstabilityandthermalstability,SOithasbroadapplicationprospects，suchasthedeepultraviolettransparentconduc

3、tivefilm，ultravioletdetectors，thinfilmelectroluminescentdevices，gassensor,andfieldeffecttransistor．Inthispaper,Ga203seedlayerwasfabricatedonsapphiresubstrates(A1203)byRFmagnetronsputteringtechnology,andthesapphiresubstratewiththeseedlayerwasannealedtreatment．．The

4、nGa203filmswerefabricatedonsapphiresubstrateswithseedlayerandwithoutseedlayerbyMOCVDtechnology．1．Ga203filmswerefabricatedonsapphiresubstratesbylow-pressureMOCVDtechnology．ThecrystalandopticalqualityofGa203thinfilmswasinvestigatedbyX-raydiffractionandopticaltransm

5、ittancespectra．TheGa203filmisamorphousthatgrowndirectlyonthesapphiresubstrateandthetransmittanceandtheopticalbandgapwidthoftheGa203filmsareverysmall．Theexperimentshowsthat，thecrystalqualityandtheopticalpropertiesoftheGa203filmsarenotidealwhentheGa203filmswerefabr

6、icateddirectlyonsapphiresubstratesbyusinglow—pressureMOCVDtechnology．2．Inordertosolvetheaboveproblem，Ga203seedlayerwasfabricatedonthesapphiresubstratebyRFmagnetronsputtering，thenthe13-Ga203filmswerefabricatedonsapphiresubstrateswiththeseedlayerbylow-pressureMOCVD

7、technology．Theexperimentshowsthat，RelativetotheGa203filmsfabricateddirectlyonsapphiresubstrates，thecrystalqualityandtheopticalpropertiesoftheGa203filmsfabricatedonsapphiresubstrateswithGa203seedlayerhaveimproved，butnotevidently．3．TheGa203seedlayerwasannealedatahi

8、ghtemperature，thenthep-Ga203filmswerefabricatedonsapphiresubstrateswiththeannealedseedlayerbylow-pressureMOCVDtechnology．TheXRDshowsthat，theGa203filmshavetheob