硅基ZnO材料生长与硅基GaN交通绿LED老化性能分析

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1、硕士学位论文硅基ZaaO材料生长与硅基CaN交通绿LED老化性能研究GrowthofZIllOthinfilmsollSisubstrateAndagingtestofSi—basedGaNtraffic-greenLEDAbstractThisthesiscontainstwoparts：1．MOCVDgrowthofZnOthinfihllsonSi(t11、substrate；2．Si-basedCaNtraffiC—greenJi曲temittiJagdiodedegradationunderdifferentelectricalstresses．1．MOCVDgr

2、owthofZnOthinfilmsonsi(111、subsumeZnO，asawidedirect—bandsemiconductor，attractsmuchattentionasGaNinoptoelectronicsresearchfield．AlthoughrecentlytheP-i—njunctionZnOLEDhasbeenrealized，andhigh—qualityZnOfihnshavebeenreportedsomewhere，thereisstillagaptoitscormaaereialapplication．RecentlyUlOStof

3、ZnOfilmshavebeengrownonsapphire(A120s)，butA1203isexpensive，electricallyinsulatingandbadthermallyconductive，whichintroducedcomplexitytodevicefabricationprocesswhengrowncrystalsareappliedtoinjection—light—emittingdevices．ButelectricallyandthennallyconductiveSiSUbstrateischeaperthanAlz03subst

4、rate，whichwillreducethecostofZnO—LED．Si，asoneofthefirstsemieonductors，hasaverymaturetechnology，suchasnlatureFabrication，nlatureintegrmionandSOon．Thus，itwillbeverygoodfbrrealizingtheoptical—electricintegrationbasedonZnO．However，duetothehighmismatchoil"thecrystalstmctureandthermalexpansionbe

5、tweenZnOfilms9ndSisubstrate，itisdifficulttodirectlygrowZnOfilmOnSisubstrate．Theretbre，inordertoimprovethequalityofthemm．differemtnaterialshavebeenintroducedbetweenZnOandSiasbuffers．ZnOfilmswerepreparedbyatmospheric-pressureMOCVDOU’Fi／Si(111)templates，withDEZn，DMZuanddeiunizedwaterasZhprecu

6、rsorsandOprecursors，respectively．AndtheeffectofthegrowthconditionOnZn0filmswasstudied．ZnOfilmswerepmparedbyatmospheric—pressureMOCVDonTi／Si(111)templates．TheTiillm011Si(111)wasdepositedbyelectronbeamevaporati011，whichis1-2rimthick．First，whenZnOfilmwasgrownwithDEZnanddeionizedwaterasZuprecu

7、rsorsand0precursors，respectively，thedifferentgrowlhlimesofthelow-temperatureZnO(LT．ZnO)¨I硕士学位论文硅基ZnO材料生妖与硅基GaN交通绿LED老化性能研究buffermakethegrownZnOfilmshavedifferentproperties．SomeoptimizinggrowthparmnetersofLT—ZnObufferWaSobtained．Second，underthesamegrowthconditi