资源描述：
《A Displacement-Measuring Instrument Utilizing Self-Mixing Interferometry》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。
1、IEEETRANSACTIONSONINSTRUMENTATIONANDMEASUREMENT,VOL.52,NO.6,DECEMBER20031765ADisplacement-MeasuringInstrumentUtilizingSelf-MixingInterferometryM.Norgia,Member,IEEE,andS.Donati,Fellow,IEEEAbstract—Wedevelopaself-mixinglaserinterferometerforthemeasurementofdis
2、placementsonagenerictargetsurface.Themeasurementisbasedonthebright-speckletracking,atechniquewehaverecentlyproposedtosolveamplitudefadingassociatedwiththespecklestatisticswhenthedisplacementtobecoverediswellinexcessofthespecklelongitudinalsize.Weimplementthe
3、dynamicaltrackingofspecklemaximawithpiezoactuatorsandaphase-sensingloop.Also,weuseanautomaticgaincontrol,basedonaliquidcrystalattenuator,toimprovetheamplitudestatistics.DetailsofdigitalsignalacquisitionwithadaptivesignalprocessingFig.1.Basicelementsofaself-m
4、ixinginterferometer.throughafieldprogrammablegatearrayarediscussed.Theresultinginstrumentofferssub-mresolutioninthemea-surementofdisplacementupto500mmoftotalshift,hasvirtuallytheanddrives,thenperformasynchronousdetectionandnoneedforalignment,andhasveryrelaxe
5、dtarget-surfacerequi-sites,yetworkswithaverysimpleandinexpensiveset-up.low-passfilteringoftheresult,andlastlyfeeditbacktothedrive.IndexTerms—Lasermeasurements,opticalfeedback,opticalin-terferometry,roughsurfaces,semiconductorlasers,speckle.Intheactualtrackin
6、gofbrightspeckles,thespotprojectedonthetargetmovesverylittle(m,typically)—unnotice-ablebyeye—andthedistanceerrorbyparallaxisnegligible.I.INTRODUCTIONNevertheless,thespecklestatisticsaremuchimproved[1],andECENTLY,wehaveproposedandexperimentallythesystemjumpsf
7、romonebrightspeckletothenextwhenitRdemonstrated[1]aprincipletoperformaninterfero-approachesanearlyzero-intensitypoint,notsouncommoninmetricmeasurementofdisplacementonanoncooperative(oranormalspecklefield.Also,theerrorduetospecklejumpisrough)surface.negligibl
8、e[1],atleastina-stepmeasurement.Asitiswellknown,theopticalfieldreturningfromanonco-Bytrackingtheamplitudetothespecklemaximum,ween-operativetargetisaffectedbythespeckle-patternstatistics,and,sure
