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1、PublishedinThinSolidFilms403-404,179-187,20021whichshouldbeusedforanyreferencetothisworkMicrocrystallinesiliconand‘micromorph’tandemsolarcellsArvindShah*,J.Meier,E.Vallat-Sauvain,C.Droz,U.Kroll,N.Wyrsch,J.Guillet,U.GrafInstituteforMicrotechnology(IMT),UniversityofNeuchatel,ˆˆCH-
2、2000Neuchatel,SwitzerlandAbstractThecaseforthin-filmsiliconasoneofthemainfutureoptionsforcost-effectivephotovoltaicsolarcellsisoutlined.Thelimitationsofpresentamorphoussilicon(a-Si:H)solarcellsarebrieflymentioned.Hydrogenatedmicrocrystallinesilicon(mc-Si:H)depositedbyPECVD(plasm
3、a-enhancedchemicalvapordeposition)atlowsubstratetemperatures(approx.2008C)constitutesanewandadditionalpossibilityforsolarcells.Propertiesofintrinsicmc-Si:HlayersdepositedbyPECVDatVHF(veryhighfrequency)excitationfrequenciesarelisted,togetherwiththenecessaryconditionsforobtainingd
4、evice-gradematerial.Performancesobtainedsofarwithmc-Si:Hsolarcellsaregiven;thelatterarecomparedwithestimatedlimitsforpn-andpin-typedeviceswithEgs1.1eV.Finally,presentperformancesandfutureperspectivesfor‘micromorph’(mc-Si:Hya-Si:H)tandemsolarcellsarediscussed.Keywords:Thin-filmsi
5、licon;Photovoltaicsolarcells;c-Si:Hlayers;Micromorph1.Introductiontechnologypresentlyaccountsforover80%ofPVmodulesproduced,andeventhoughithasinthepastForphotovoltaic(PV)solarenergyconversiontotwodecadescontributedtoasubstantialdecreaseinPVbecomeasubstantialcontributortothegenera
6、lproduc-moduleprices,itsfurtherpricereductionpotentialcantionofelectricity,amassiveincreaseinmoduleproduc-beconsideredtoberelativelymodest.Indeed,atthistionvolumeoverthepresentvalueofapproximatelymoment,pricesofPVmodulesfabricatedfromcrystal-300MWpyyearisneeded.Indeed,itisonlyat
7、worldlinesiliconwafersarestagnatingatalevelofapproxi-productionlevelsintheorderofmagnitudeof100–matelyUS$4yWp(Fig.1).1000GWpyyearthatPVsolarmoduleswillhaveaThereis,therefore,growinginterestinthin-filmPVnoticeableeffectinthesubstitutionoffossilfuelsorintechnologiesw1x.thereplacem
8、entofnuclearpowerstationsonaglobalAmongstthese,
