资源描述：
《微图形转移技术-光刻》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。
1、微图形转移技术——光刻微型机电系统课程系列之三卢德江djlu@mail.xjtu.edu.cn西安交通大学精密工程研究所InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU1BasicofPhotolithography2MaskFabrication3MaskAligner4PhotolithographyProcess5ResultsJudgement微型机电系统课程系列之三
2、InstituteofPrecisionEngineering,XJTUUV曝光显影后续加工微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU1BasicofPhotolithography2MaskFabrication3MaskAligner4PhotolithographyProcess5ResultsJudgement微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之四In
3、stituteofPrecisionEngineering,XJTU1BasicofPhotolithography2MaskFabrication3MaskAligner4PhotolithographyProcess5ResultsJudgement微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU光源光阑快门掩模光刻胶层微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三In
4、stituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTUParallellightMaskPhotoresistParallellightMaskPhotoresistContactExposureModesSoftcontact(adjustablemechanicalpressure)Hardcontact(additionalnitrogenpressure)Vacuumconta
5、ct(evacuationofexposuregap)Softvacuum(vacuumcontactwithadditionalnitrogenpressure)MechanicalpressureN2MechanicalpressureVacVacMechanicalpressureMaskChuckMechanicalpressureVacN2西安交通大学精密工程研究所InstituteofPrecisionEngineering,XianJiaotongUniversity微型机电系统课程系列之三微型机电系统课程系列之三InstituteofPrecisionEngineerin
6、g,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU1BasicofPhotolithography2MaskFabrication3MaskAligner4PhotolithographyProcess5ResultsJudgement微型机电系统
7、课程系列之三InstituteofPrecisionEngineering,XJTU基底清洗匀胶前烘曝光显影后烘烘干中烘漂洗微型机电系统课程系列之三InstituteofPrecisionEngineering,XJTU西安交通大学精密工程研究所InstituteofPrecisionEngineering,XianJiaotongUniversity微型机电系统课程系列之三01020304050600500100015002000
