磁电阻传感器制备及噪声特性研究

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1、分类号TH73学号14030049ＵＤＣ密级公开工学硕士学位论文磁电阻传感器制备及噪声特性研究硕士生姓名胡悦国学科专业仪器科学与技术研究方向电磁测量与传感指导教师潘孟春教授国防科学技术大学研究生院二〇一六年十一月PreparationforMagnetoresistanceSensorsandStudyontheNoiseCharacterizationCandidate：HuYueguoAdvisor：PanMengchunAdissertationSubmittedinpartialfulf

2、illmentoftherequirementsforthedegreeofMasterofEngineeringinInstrumentScienceandTechnologyGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha，Hunan，P.R.China（November，2016）国防科学技术大学研究生院硕士学位论文目录摘要...............................................

3、..................................................................iABSTRACT.........................................................................................................ii第一章绪论...............................................................

4、.......................................11.1论文研究背景和意义.....................................................................................11.1.1课题来源..............................................................................................11.1.2选题背

5、景及研究意义..........................................................................11.2国内外研究现状.............................................................................................61.2.1磁电阻传感器简介....................................................

6、..........................61.2.2磁电阻传感器的噪声研究现状..........................................................81.3论文的主要内容和结构安排.......................................................................12第二章磁隧道结传感器的工艺实现...........................................

7、.....................142.1磁隧道结多层膜生长...................................................................................142.2磁隧道结微加工工艺...................................................................................172.3磁隧道结传感器的退火工艺..................

8、.....................................................222.4本章小结.......................................................................................................24第三章隧道结磁电阻测量系统设计................................................................253.