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1、JournalofPolymerResearch(2006)13:25–32#Springer2005DOI:10.1007/s10965-005-9006-xInjectionMoldingofMicroprobeArrayPartsPei-ChiChang*andSheng-JyeHwangDepartmentofMechanicalEngineering,NationalChengKungUniversity,Room905,No.1,UniversityRoad,701Tainan,Ta
2、iwan(*Authorforcorrespondence;Tel.:+886-06-2373144;Fax:+886-06-2749411;E-mail:pade@mail2000.com.tw)Received3February2005;acceptedinrevisedform17May2005Keywords:electroforming,injectionmolding,KOHetching,microprobeAbstractThesharptipsofamicroprobearra
3、yinstalledinanendoscopecanpenetratecancercellinstomachorintestines,andthendeliverdrugorgeneintocellsfortreatment.Inthisstudy,twomicroprobemasterswerefabricated.Thefirstmodelisa2single-crystalsiliconbasedmicroprobearray(height=õ80mm,aspectratioõ1.7,den
4、sity=780/cm),whichwasfabricatedbyKOHwetetching.Thesecondmodelisastainlesssteelmaster,whichwasfabricatedbyWEDGandassembledwithacupunctureneedles(height=õ890mm,aspectratioõ4.5).Nickelwaschosenasthematerialforelectroformingmoldinsert.HighflowratePCandgen
5、eralpurposePPwereusedtomoldmicroprobepartsbyinjectionmoldingandinjectioncompressionmolding.Intheexperiment,itwassuccessfultoduplicatemicroprobeswithPPbyinjectioncompressionmolding.Taguchimethodwasusedtofindtheclosetooptimalprocessingparametersandtheco
6、ntributionoftheinjectioncompressionmoldingparameters.Abbreviations:KOH:potassiumhydroxide;WEDG:WireElectroDischargeGrinding;PC:polycarbonate;PP:polypropylene.Introductionsingle-crystalsiliconandanisotropicetchantcanmakesharpprobesorgrooves.However,th
7、erearetwolimi-Microstructurepartsarewidelyusedforautomobile,tationsonusingsingle-crystalsilicon.Thefirstoneistheaircraft,biochemical,measurement,informationtech-heightandaspectratioofmicroprobesareconstrainedbynologyandmedicalapplicationsetc.Theprecis
8、ionrequire-etchingparameters.Thesecondoneisthesingle-crystalmentsformicropartsorpartswithmicrofeatureisaroundsiliconwillabsorbproteinsothatitisnotsuitableformicronandthesurfaceroughnessrequirementsexceedprotein-genesolutionorbiochip.sub-micron.Tosati