酞菁薄膜材料气体传感器研制及其特性研究

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1、AbstracCAbstractAsanewtypeofsensor，gaSsensordeVelopedVe巧quicklytoday．ThethinfilmmaterialshaVeaparticularmicrostructure，、vonder向lphysicalandchemicalpropenies，excellentsurf．acecharacter'whichmakethethin行lmtechnoIogybecomethekeyofthegassensortechnique．Metalphthalocyanine(MP

2、c)andtheirderiVatiVesareo唱anicmaterialsofP·typesemiconductorhaVingthethe硼al／chemicaIstabili够Duetothephthalocyaninef}ameworkwecanchangethecentralmetalionorimroduCe缸nctionsubStitutedgroupssuchasalkyloralkoxyintomeperiphemlpositionsorthea)【is．IthaSspecialpropeniesincludingo

3、ptic，electric，acoustic，calorific，magneticandchemicalandsoonViamodulatingitscompositionofthemolecule．ThegaSSensingmechaJlismofphthalocyaninesandinnuenceofthinfilmstmctureandsubstitutesongaS—SensitiVitywereillustratedinthisp印er．TheresultshaVesho、vedthegaSSensingcharacteris

4、ticwasdependentontheselfstmcturea11dthemorphologyofmefilms．W色Studiedthesyntheticmethodoftophthalocyanine．UsingsolVemsynthesismetallophthalocyaninesbybenZenebitterwine-urealaw，asensitiVefilm、vaSgro、)moninterdigIlitelectrodesbyVacu啪sublimationaRerthepurification．Thec巧stals

5、tructuresofthephthalocyanine6Ims、ⅣerecharacterizedwithXRDaIldFT．IR．111eanalysisofSEMshapeindicatedthatthesizeofthefilmwasparticIesequalized．WbalsofoundthatmetallophthalocyaninemainIyhaS铆oadsorptionbandsthrou曲Uv．Visibleabsorptionspectmm．OneisQbandat600～800nm，theotheroneis

6、Bbandat250～350砌．111eadsorptionspectmm、villEinsteinshiRaRerthephthalocyanine6Imwas甜mealed．Itdemonstratedthecrystalformchangedf．roma-fo咖t0p—f0咖．ThestTllctureandtechnologicalpmcessofgassensorweresimulatedandoptimizeduSingtheIntellisuitesoRware．Anintegratedthin-filmgaSSensor

7、wasreaIizedbytechnoIogiesofmicroeIectro—mechanicalsystems(MEMS)．TheworkprincipleofgassensorwasdiscussedtheolIetically．Meanwhile，wetestedandanalyzed黑龙江大学硕士学位论文theSensingmaterialsofgaSSensor．Thetestingresultsindicatedthatthemetalphthalocyaninesensingfilmscouldexhibittheopt

8、imalsensingcharacteristicwhenthegassensorworkedatroomtemperatureorlowtemperature．Thesensingfilmshadexce