高精度定位平台标定技术

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1、上海大学硕士学位论文高精度定位平台标定技术姓名：葛轶君申请学位级别：硕士专业：精密仪器及机械指导教师：程维明20040201AbstractCalibrationtechnologyofhi曲-precisepositioningtablemeansthemeasurementandanalysesoftheconclusionthathigh-precisepositioningtablehasarrivedatHigh—precisepositioningtableplaysanimportantroleinaccurateMEMS—manufacturingequipments．

2、Anditmainlyexecutestheaccuratemicro—adjustmentsofnanometricaccuracyandresolutioninM匠MS．assemblingprocess．Withthedevelopmentsof～皿MStechnology,hand-assemblingwjthmicroscopecallnotmeettherequirementsofmassserialproductionofMEMS．TheaccurateMEMS．manufacturingequipmentsarekeyfoundationsofresearchesand

3、developmentsofMEMs．sohi曲·precisepositioningtableishi武lyimportantforthedevelopmentsofmicro—electronicindustryNormallyhigh—precisegauging-apparatusmustbeavailableforthecalibrationofthepositioningtablehavingSOhighaccuracy．Researchesofthecalibrationtechnologyofhigh-precisepositioningtablehavebecomem

4、oreimportant．Calibrationtechnologyofhigh-precisepositioningtablemainlyrelatestomicro—displacementmeasuringtechnologyandcalibrationofpositioningtable．TheresearcheshavealsobeenmadeinthesetWOaspects，includingthreepartsasfollowed：1Theintemationalanddomesticdevelopmentsofhigh．precisedisplacementmeasu

5、ringandpositioningtechnologyaresummarizedVariousmethodsofmicro—displacementmeasuringandpositioningareintroducedandtheiradvantagesordisadvantagesarecomparedThenweintroducethedevelopmentofluserinterferometertechnologythatisapartofopticalmeasuringmethodsandanalyzetheperformanceofadvancedIaserinterf

6、erometersintheworld2，Principlesof】aserinterferometer’sdisp／acementmeasuringarediscussed．Thecharacteristicsofsingle．frequencylaserinterferometeranddual·frequency】aserinterferometerareanalyzedVariouserrorsthatwillappearduringtheprocessoflaserinterferometer’smeasuringareexplained．FortheaboveWOrk、we

7、decidetousesingle—frequencylaserInterferometermeasuringsystemL·LM-20BmadebyTOSEIEngineeringforourresearches3．Weestablishthecalibrationmeasuringsystemonthebasisofsingle—frequency1aserinterferometermeasuringsystemL-LM．20BWeana