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1、‘...............圣摘要本文从SrTiO,陶瓷薄膜的合成、氧敏性能及掺杂对SrTio,薄膜性能影响三个方面，对这种新型汽车用稀薄燃烧空燃比氧传感器材料进行了系统的研究，并初步探讨了采用膜的复合来消除SrTiO,中存在的p-n转变。先，研究了Ti(OC,H击和SrCl:为主要原料，乙醇为主溶剂，J制备STTi03溶胶的工艺，并采用溶胶一凝胶法合成了立方钙钦矿薄膜。比较了烧成温度对薄膜性能的影响，并确定了最佳拉膜次数。明:采用上述方法制备的溶胶可稳定存在半年以上，粘度变化不大;烧成温度对薄膜的电
2、阻、灵敏度及掺杂都有明显的影响，相对于800℃烧成而言，烧成温度为1000℃的薄膜晶粒发育完好，尺寸均匀，具有较低的电阻和较高的灵敏度，并可促使掺杂物进入晶格发挥掺杂效果:10次成膜的SrTio,薄膜具有最佳的灵敏度。为了进一步降低SrTi03薄膜的电阻及提高其氧敏感性，对SrTi03薄膜进行了B位掺杂改性研究。研究发现:铁的掺入降低了薄膜电阻;外加掺铁使薄膜的灵敏度有较大的提高。采用SrTiO。与Cr2O。膜的复合以消除SrTi03薄膜中的p-n转变。实验表明:双层复合膜表现出接近电极端薄膜的电性能，而
3、串联复合膜则表现出两种薄膜性能的加和。因此采用后一种复合方式在理论上可犷全消除“rTio,薄膜中的p-n转变，但还需找到两种薄膜适合的电阻匹配。Il一一关键词:溶胶一凝胶法，SrTio,薄膜，氧敏特性，掺杂，Cr,O,薄膜，复合膜AbstractPerovskite-typeSrTiO,isoneofnewlyoxygensensingmaterialsforlean-burnANratiooxygensensors.Inthispaper,synthesis,oxygensensitivityandth
4、eefectsofacceptor-dopingonelectricalpropertiesoftheSrTiO,thinfilmhavebeenstudiedsystematically.ExperimentalworkhasbeengiventothesyntheticprocessofstableSrTiO,solusingTi(OC,H9)4andSrC12asrawmaterials,ethanolandwaterassolvents少respectively.Bydip-coatingmeth
5、od,SrTiO,thinfilmsonA1z03substratehavebeenprepared.Theefectsofsinteredtemperatureanddipping-coatingtimesonpropertiesofthefilmswerealsostudied.Themajorconclusioninclude:(1)thesolcanexistforsixmonthswithoutdepositorgel,andhasstableviscosity;(2)comparedto800
6、'C,thefilmsinteredat10000Chaslowerresistanceandhigheroxygensensitivity,andisalsohelpfulfordopantionenteringcrystallatticeandplayingarole;(3)bytestingthedip-coatingtimesversussensitivity,theoptimumdippingtimeisgottenastentime.Diferentacceptordopantswereals
7、ostudied.Theresultsshow:theFe-dopedfilmshavelowerresistanceandresistance-temperaturecoefficient;besidesthat,theFe-dopedfilmswithSr/Ti=1showbetteroxygensensitivity.SrTiO,Cr,03complexfilmswerepreparedforpurposesofremovingp-ntransition.Experimentshows:double
8、layerfilmbehavesthepropertiesofthefilmnearelectrode;theparallel-compoundingfilmbehavesbothpropertiesoftwofilmsSothep-ntransitioncanberemovedbythelastconnectionincaseofappropriateresistancematching.Keywords:sol-gel,S
