表面处理蓝宝石基片对ZnO薄膜性能的影响

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1、硕士学位论文表面处理蓝宝石基片对ZnO薄膜性能的影响StudyofZnOfilmsgrownOHthetreatedsapphiresubstrates学号：21002065指导教师：毯庞验教援完成日期：2Q13生5月大连理工大学DalianUniversityofTechnology大连理工大学学位论文独创性声明作者郑重声明：所呈交的学位论文，是本人在导师的指导下进行研究工作所取得的成果。尽我所知，除文中已经注明引用内容和致谢的地方外，本论文不包含其他个人或集体已经发表的研究成果，也不包含其他已申请学位或其他用途使用过的成果。

2、与我一同工作的同志对本研究所做的贡献均已在论文中做了明确的说明并表示了谢意。若有不实之处，本人愿意承担相关法律责任。学位论文题目：作者签名：表面处理蓝宝石基片对ZnO薄膜性能的影响StudyofZnOfilmsgrownonthetreatedsapphiresubstratesAbstractAsamultifunctionalsemiconductor，ZnOhasbeenwidelyusedintransparentconductivefilm，surfaceacousticwavedevice，gassensorandp

3、hotoelectricdevices．However，oneofthemostexcitingapplicationsofZnofilmsiscertainlyrelatedtoitsopticalproperties．SincethebandgapenergyofZnOis3．37eVatroomtemperature，itistransparentinboththevisibleandneatultraviolet-visiblewavelengthregion．Theexcitonbindingenergyisquite

4、high(60meV)，anditluminescesintheultraviolet(UV)region(around380nm)makingZnOapossiblefuturecontenderforUVandblue—light—emiUingdevices．TherearealotofsubstratesforthegrowthofZnO，butmismatchofsubstrateandfilmbecameaproblemofheteroepitaxialfilm．Duetoadvantageoflatticestru

5、cture，lowcostandlargearea,sapphireisgoodchoosingforthedepositionofZnO．SurfacetreatmentofsapphirehasbecomeaveryimportanttechnologyforimprovingthequalityoftheZnOfilm．After1000—1400oCannealedinair，thesurfaceofsapphirecouldhaveatomic-smoothterrace—ledge-kinkstructure．Itw

6、asfoundthattheatomicsmoothsurfacebenefitsforgrowthofZnOfilms．However，reliableevidenceisstilloflacking．Inthisthesis，theinfluenceofsapphireannealingonthecrystallinityofZnOfilmsisstudied．ByusingX-raydiffraction(XRD)，atomicforcemicroscope(AFM)，weinvestigatethemorphologyo

7、fsapphiresubstratesandthemorphology，epitaxyrelation，andstructureofZnOfilmsgrownonthesubstratesannealedatdifferenttemperaturesinairandintheatmosphereofnitrogen．TheopticalpropertiesofZnOfilmsarealsostudied．Inaddition,wealsostudythegrowthofZnOnanorodsgrownonsapphiresubs

8、trateswithabufferlayerofZnO，whichareannealedatdifferenttemperature．ThemainresultswereaSfollows：1．Inairenvironment．theannealedsapphi