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1、上海交通大学硕士学位论文微纳压印技术的应用及抗粘涂层的研制姓名：顾盼申请学位级别：硕士专业：微电子学与固体电子学指导教师：刘景全20070101上海交通大学硕士学位论文ABSTRACTTHERESEARCHOFNANOIMPRINTANDANTI-ADHESIVEFILMABSTRACTMoore’sLawtellsusthatthenumberoftransistorsonamicroprocessorwoulddoubleapproximatelyevery18months.Butwiththed
2、evelopmentoftechnology,thecostoflithographyequipmentincreases.NanoimprintisapromisingNextGenerationLighography(NGL)technology.Andnowitisgraduallyappliedondifferentareasofmicrofabricationforitsadvantagessuchaslowcost,goodreduplication,easytocontrol.Inthi
3、sthesis,wereviewthebackgroundandtherelatedresearchofnanoimprintathomeandabroad,andthenwebegintheresearchinapplicationofnanoimprint.Thisthesisintroducesthetechnologyprocessofhot-pressednanoimprintfirstly,andthentriestoreduplicatethespecificdevicebynanoim
4、printtechnology.Thedevicewedecidetoreduplicateismicro-structuredgrating.Theperiodofthegratingpatternis1.67µandthelinewidthis830nm.Themicro-structuredgratingwouldappliedonthedensewavelengthdivisionmultiplexing(DWDM)atthewavelengthof1550nm.Thestampofgrati
5、ngisfabricatedbyholographicdiffractionandinductivecoupledplasma(ICP)technology.Thenwegettheimprintedpatternbyhot-pressedtechnologyandusepolyethyleneterephthalateglycol(PETG)astheimprintedmaterial.Inthisexperiment,weoptimizetheparametersintheimprintproce
6、ssandanalyzethedisadvantagesofthistechnology.Becausetheimprintprocessisusedonmicro-structure,thefrictionforceandtheremovingofstampisakeyproblemforthequalityofimprintedpattern.Forabetterimprintresult,wefabricatetheanti-adhesivefilmonthesurfaceofstampby1H
7、,1H,2H,2H-perfluorodecyltrichlorosilaneandRIEreaction.Westilltesttheaverageroughness,contactangle,surfaceenergyandappearanceofthesurface.Theyallprovethatthesetwokindsofanti-adhesivefilmareeffectiveintheprocessofnanoimprintandcanhelpus第II页上海交通大学硕士学位论文ABS
8、TRACTtogetbettermicro-gratingdevice.Keywords:nanoimprint,MEMS,micro-structuredgrating,anti-adhesivefilm第III页上海交通大学学位论文原创性声明本人郑重声明：所呈交的学位论文，是本人在导师的指导下，独立进行研究工作所取得的成果。除文中已经注明引用的内容外，本论文不包含任何其他个人或集体已经发表或撰写过的作品成果。对本文的研究做出重要贡献的个人和集体，均已
