纳米精度测量与校准系统关键技术研究

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1、西北工业大学博士学位论文纳米精度测量与校准系统关键技术研究姓名：黎永前申请学位级别：博士专业：机械制造及其自动化指导教师：朱名铨2003.1.1西北工业大学博士论文之间的对应关系；研究了基于复合式悬臂梁柔性铰链的二维十字对称柔性铰链结构，对其模态频率以及位移应力特性进行仿真试验：(结果表明此种结构形式的运动对称性很好；其驱动位移与结构体最大拉压应力值之间接近线性关系，而且这种结构可以得到100“ITI以上的运动位移。乒6．基于二维十字对称柔性铰链结构的微位移工作台试验测试。利用单频激光干涉仪测试其运动定位误差特性，相

2、位偏移干涉法测试运动转角误差，光电自准仪测试其运动偏摆误差。f该研究为纳米精度校准技术系统中位移驱动与定位装置研究提供了基础，试验数据为测量数据综合误差补偿技术研究奠定了基础。＼7关键词：纳米计量i校准玎相位偏移干涉；外差式干涉仪?柔性铰链误差补偿Ⅱ西北工业大学博士论文Title：TheKeyTechnicalResearchofMajor：Name：Supervisor：AccuracyMeasurementsandSystemsMechanicalEngineeringLiYongqianZhuMingquanS

3、ignature：AbstractNanometerCalibrationWiththeincreasingoftheaccurateofthemodernmanufacture，researchonnanometermeasurementmethodandestablishingofnanometercalibrationsystemshasbeenoneimportantdomain．ThisdissertationiSbasedupontheproject”theResearchonNanometerCalib

4、ration”(No．60102102)，andthe“StudyofMicro—positionSystemsforNanometerPrecisionCalibrationTechnology”fNO．01153077)supportedbytheAeronauticSciencefoundationofChina．Thispapermainlyincludesthefollowingaspects：1．Thedeviationintroducedbyreferencephaseshiftingerrorsonf

5、our—stepsandfive·stepsalgorithmareanalyzed．Basedontheprincipleofphasealgorithm，anovelcompensationmethodofreferencephase—shiftingerrorisdescribedforfour-stepsalgorithmandthefive—stepsalgorithm．Thetheoreticanalysisanddatasimulationindicatethatthephasedeviationari

6、singfromthefirstandthesecondharmonicreferencephase-shiftingerrorscanbeeliminatedusingthismethod．Byusingaphaseshiftinginterferometerwithresolutionof0．1am，thecompensationmethodwasexperimentallyverified．2．TheapplicationofthephaseshiftinginterferometryinNanometerAc

7、curacyMeasurementandCalibrationSystems(NAMCS)iSstudied．ThemeasuringsystemtomeasurethedimensionalrotationerrorsoftheNAMCSisconfigured．Theprineipiumexperimentverifiedthismethod．3．Thenon-linearityerrorsintheheterodyneinterferometryisinvestigated．Fortheheterodynein

8、terferometerusedwithinthenanometerandsub—nanometerregion，thefrequencyleakagesduetotheimperfectopticalelementsandthethermalnon—linearitydriftrestrictitsuncertaintytoabout20nm