采用新型分子筛敏感材料的谐振式气敏传感器

《采用新型分子筛敏感材料的谐振式气敏传感器》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、复旦大学硕士学位论文采用新型分子筛敏感材料的谐振式气敏传感器姓名：黎坡申请学位级别：硕士专业：微电子学与固体电子学指导教师：黄宜平20030520AbstractTransducertechnology，onepillarofthemoderninformationtechnology，hasdevelopedbybounceandleapsworldwidelysince1980s．Inneedsofenvironmentalprotectingandwiththeimprovementsofpeople’Slivingstan

2、dard，gassensor，oneimportantsortoftransducer，areappliedmuchmorefrequentlyandwidely．Forexample，weneedagassensortomonitorandmeasurethequantityofleakedffeonfromair-conditionforthedeteriorating”GreenHouseEffect”；inmedicalcare，gassensorisneedtomeasuretheconcentrationofaceto

3、neexpiredfromthediabeticpatients，inwhichthediseasewillbeundercontr01．Atthesametime，wimtheincreaseofmeasuringrequirement，gassensorisdevelopingtowardsminimizationandsmartonthebasisofimprovingitssensibilityandselectivity．Asaresult，MEMSgassensors，whicharebackedbythemicroe

4、lectronictechnology,havebecomethehotspotofgassensors．Thethesisisfocusedonthestudyofthreekindsofmass——sensiblebase．．transducer：PZTresonatingmicrocantilever,laserexcitingmicrocantileverandQCMrespectively．111eauthorstudiedtheprocessandmeasuringofPZTmicrocantilever,thenth

5、edesignandprocessofmicrocantileverforlaserexciting．Thelastresonatingfrequencymeasureofthemicrocantileverhasprovedthefeasibilityoflaserexitingmethod．111estabilityandhow—tOmodificationzeoliteofthegMHzAT-cutQCMquartzcrystalareresearchedtoo．ForthefirsttimebycombiningtheMF

6、IzeoliteandthenewtypePZTmicrocantilever，thethesisgetahighselectiveandsensitivefreongassensoETheresultsshowagoodresponsetothelowconcentrationffeon，e．g．10ppm．Thesensitivityof-0．0024％dppmtoresponsetofreongasandaminimumdetectablemassloadingof3．5×10一gareexhibitedwhilethere

7、isalmostnoresponsetoethan01．whichshowsgoodselectivity．AcomparativelygoodreversibilityandrepeatabilityofthesensoraregotfromtheresultstOO．Inordertofurthervalidateandknowmoreaboutsensibilityandselectivityofthesensible·materialzeolite，thethesiscombinesArZSM一5llanozeolitea

8、ndQCMtostudytheresponsetoacetone．Theresultindicatedthissensorhasagoodfrequencyresponsestodifferentconcentrationofacetonegas．