微结构动态变形的光学测试方法与应用研究

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1、东南大学博士学位论文微结构动态变形的光学测试方法与应用研究姓名：陈凡秀申请学位级别：博士专业：工程力学指导教师：何小元20070529东南人学博I‘学位论文关键词：微结构；力学性能；离面变形；翘曲；三维形貌；数字散斑相关方法；散斑投影相关方法；傅里叶变换轮廓术；小波变换方法；高分子材料；芯片；悬臂梁llAbstractwjtIlthedevelopmentofMicro—electro-mechanicalsystem(MEMS)．alotofmechanicalmembershavecomeforth．Forexamplemicrogemel，microarrest

2、er,microcantileverandmicrobridge，andsoon．BecausetheWeesize，theseminisizemechanicalmemberswereoftenbelookedasthemembranefranles．Themechanicscharacteristichavemanydifferencesbetweentheseminisizemechanicalmembersandlargemechanicalmaterial．Andwecouldn’t嘴theparametersofmacroscopicalmaterials

3、weusuallyusedtoanalyzethemechanicscharacteristicofmembraneframe．Alongwitllthedevelopmentofmicro—electro—industrial．thecempositivedegreeoflargescaleintegrationhasbecomestrictnessandintegrateckcultisdevelopingfortheminiaturizationdirection．Duetothedegreeofintegrationand1111’nisizevolunle,

4、theintluencesofcircumstancebecomesensitivity．11伦r刎ormanceresearchofmicrostructurebeconl鹉veryimportantandhardship．Furthermore．theopticsmeasurementmethodisanon-contact,wholefieldtechniquedeformationmeasuremem．Andtheopticsmeasurementmethodhasbeenappliedtomcasur；ein-planedeformation,out·pla

5、nedeformation,three-demensionsurfaceandthemechanicscharacteristicofmaterials．111eadvantagesofopticsmeasurementmethodgiveprominencetothestaticanddynamicdeformationmeasurerneutofmicrostructureandbecomeoueofthebeStofallbasicandeffectivemethod．Out-planedeformationisoneofbasicparametersofopt

6、icsmeasmementmethod．Traditionalmethodmeasuringout-planedeformationOftenneedmakeasamplepretreatment，15nrenamodel．ThenIlsespecialopticalorgeometryintcrferometrytoproducefringeandextractinformationfromfi'inge，thcrefore，needhighqualitymeasuremeutenvironment．Inthisdissertation，thedigitalspec

7、klecorrelationmethodisusedtomeasuretheout-planedeformationandthedeformationmeasurementbecomesimpleandrapid．Theelectrostrictiveresponseofnewmaterialismeasuredusingthismethodandagoodresultisobtained．MEMSproductwhichhavethequalityofmin'orreflectisanimportantproblemofmicromeasureme