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ID:36525361
大小:2.26 MB
页数:89页
时间:2019-05-11
《谐振式光纤陀螺的基础研究》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、浙江大学硕士学位论文谐振式光纤陀螺的基础研究姓名:郭伟申请学位级别:硕士专业:微电子与固体电子学指导教师:金仲和2003.2.1————塑塾查兰堡主堡兰ABSTRACTFiberopticgyroscope(FOG)isanadvancedinstrumenttomeasuretheanglevelocityofrotationbody.ItrealizesthemeasurementofopticalSagnaceffectusingsolidall·fiberstructure.Itovercomesmechanical-electricalg
2、yroandringlasergyro’Sreductionofdynamicperformanceandlife·spancausedbythestructureortherequirementofhighrotationratemass.Anditsolvesthefabricationtechnologycomplicationandhighcostcausedbytherigidrequirementofopticalcircuitresonation.Soitbecomesthemostcompetitivenewtypeofgyrosc
3、ope.TheinterferenceFOGisintheapplicationprocess.TheresonationFOGneedsshorterfiberorwaveguidetorealizethesamesensitivity,comparing、)l,imtheinterferenceFOG.ItCanrealizeintegrationinsiliconplanarwaveguidemoduleandintegrationofringcavity,inputandoutputopticalcircuitsandmodulatorin
4、singlechipofplanarwaveguide.ItfitstheRMOGverymuch,whichstandsforthetrendofminiaturizationofgyroscope.Inthisthesis,thetheoryofresonationFOGisanalyzedfirst.Theresonafioncharacteristicofthekeycomponent------resonationcavityandthesensifivitylimitofresonationFOGareanalyzeddeeply.Th
5、emutualrelationshipbetweenthesensitivitylimitandboththelaserdimensionandthecouplingcoefficientismainlyanalyzed,consideringthelaserdimension,couplingcoefficientofthecouplerandtheresonationcryityloss.TheproductionmechanismofthemainnoisefactorsintheresonationFOGisanalyzedsubseque
6、ntly.Thecompensationmethodsofsomekindsofnoiseswhichwecareareinduced.Inthisthesis,anovelstructureofsilicon-basedpassiveringwaveguideresonationcavityisfirstlyintroducedanddesigned.ThedesigniscombinedwitlltheMEMStechnology,whichgetsridofthecurvedwaveguidesinthepreviouswaveguideri
7、ngresonationcavityandfacilitatesopticalintegration.Thestructurehascharacteristicof“thesmallertheresonationcavity,thesmallertheloss”,whichhasapromisingfutureofminiaturizationandfitsthefieldofresonationRMOG.AkindofsystemstructureofresonationFOGisbroughtforwardbasedOn2——塑垩查堂堡主堡塞t
8、heoreticalanalysis.Thedesignofopticalcircuitsandtestelectricc
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