谐振式光纤陀螺的基础研究

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1、浙江大学硕士学位论文谐振式光纤陀螺的基础研究姓名：郭伟申请学位级别：硕士专业：微电子与固体电子学指导教师：金仲和2003.2.1————塑塾查兰堡主堡兰ABSTRACTFiberopticgyroscope(FOG)isanadvancedinstrumenttomeasuretheanglevelocityofrotationbody．ItrealizesthemeasurementofopticalSagnaceffectusingsolidall·fiberstructure．Itovercomesmechanical-electricalg

2、yroandringlasergyro’Sreductionofdynamicperformanceandlife·spancausedbythestructureortherequirementofhighrotationratemass．Anditsolvesthefabricationtechnologycomplicationandhighcostcausedbytherigidrequirementofopticalcircuitresonation．Soitbecomesthemostcompetitivenewtypeofgyrosc

3、ope．TheinterferenceFOGisintheapplicationprocess．TheresonationFOGneedsshorterfiberorwaveguidetorealizethesamesensitivity,comparing、)l，imtheinterferenceFOG．ItCanrealizeintegrationinsiliconplanarwaveguidemoduleandintegrationofringcavity,inputandoutputopticalcircuitsandmodulatorin

4、singlechipofplanarwaveguide．ItfitstheRMOGverymuch,whichstandsforthetrendofminiaturizationofgyroscope．Inthisthesis，thetheoryofresonationFOGisanalyzedfirst．Theresonafioncharacteristicofthekeycomponent------resonationcavityandthesensifivitylimitofresonationFOGareanalyzeddeeply．Th

5、emutualrelationshipbetweenthesensitivitylimitandboththelaserdimensionandthecouplingcoefficientismainlyanalyzed，consideringthelaserdimension，couplingcoefficientofthecouplerandtheresonationcryityloss．TheproductionmechanismofthemainnoisefactorsintheresonationFOGisanalyzedsubseque

6、ntly．Thecompensationmethodsofsomekindsofnoiseswhichwecareareinduced．Inthisthesis，anovelstructureofsilicon-basedpassiveringwaveguideresonationcavityisfirstlyintroducedanddesigned．ThedesigniscombinedwitlltheMEMStechnology,whichgetsridofthecurvedwaveguidesinthepreviouswaveguideri

7、ngresonationcavityandfacilitatesopticalintegration．Thestructurehascharacteristicof“thesmallertheresonationcavity,thesmallertheloss”，whichhasapromisingfutureofminiaturizationandfitsthefieldofresonationRMOG．AkindofsystemstructureofresonationFOGisbroughtforwardbasedOn2——塑垩查堂堡主堡塞t

8、heoreticalanalysis．Thedesignofopticalcircuitsandtestelectricc