基于时间差法的光学共焦式测头

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1、硕士学位论文一—■灌I■■渊置强■l■■¨a■■■_学科专业：捌芷泣量拄丕丛挝拦作者姓名：主蟹指导教师：也国疰数援千津士堂{耳审毕瞧2005年1月ABSTRACTAsatypeofmodernlarge-scaleprecisioninstruments，coordinatemeasuringmachinesbecomemoreandmoreimportantandhavebroadprospectsindomainofthethree—dimensionalmeasurements．Probeison

2、eofitsmajorcomponents，whichplaysallessentialroleintermsofmeasuringaccuracy,workingefficiencyandfunctions．Accordingtothewayofaccessingprobesaredividedintocontacttypeandnon—contacttype．Nowadays，non-contactlaserprobesarebecomingthemainstreamofdevelopmentbec

3、auseoftheirhi曲efficiency，quick-response，zerofrictionetc．Newnon—contactandconvenientprobesareneededtoenablepeopletoevaluatetheirproducts．Anewprobeisdevelopedinthisthesistosatisfythisneed，ThisprobehassmalllightspotandCanbeusedtomeasurethemicroelectro-mecha

4、nicalsystem．Adynamicactiveconfocalprobeisdevelopedinthethesis，Thedisplacementmeasurementofthevibratinglensisconvertedtotimedifferencemeasurement．ThetimedifferencebetweenthepeaksignalandthezeropointofthevibrationmotionisdeterminedbyA／Dsamplingandsinglechi

5、pcomputertechnology．Noauxiliaryarrflisusedintheprobe，whichmakestheprobenotorarmuchsimplerandoflowercostbutalSOmoree蚯cientinindustrialmeasurements．First，theoveralldesignoftheconfocalprobebasedontimedifflrentmeasurement，includingsystemstructureandimproveme

6、nt，electriccircuitandsignalprocessingsystem，isdiscussedinthethesis．Then，experimentalstudiesoftheprobeperformanceandanalysesoftheexperimentalresultsarcpresented．ThisresearchisfinanciallysupportedbytheNationalNaturalScienceFoundationofChina，projectNo．50275

7、108‘‘TheMotionMeasuringandTestingTechniquesinMEMS”andprojectNo．50075064‘'Non-contactIntelligentMeasurementofFree·FormScul!clturedSurfaces”．KEYWORDS：Coordinatemeasuringmachine，Non—contactmeasurement，Confoeal，Dynamicactiveconfocalmeasurement，Timedifference

8、measurement独创性声明本人声明所呈交的学位论文是本人在导师指导下进行的研究工作和取得的研究成果，除了文中特别加以标注和致谢之处外，论文中不包含其他人已经发表或撰写过的研究成果，也不包含为获得墨注盘鲎或其他教育机构的学位或证书而使用过的材料。与我一同工作的同志对本研究所做的任何贡献均已在论文中作了明确的说明并表示了谢意。学位论≯作者签名：夕参粕签字日期：脚年／月f7日学位论文版权使用授权书本学位论文作者完全了解墨壅本堂有关保留、使用