∑△微加速度计系统研究

《∑△微加速度计系统研究》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、学校代码：10699学号：046054049西北工业大学硕士研究生学位论文(学位研究生)题目：∑．A微加速度计系统研究作者：指导老师：专业技术职务：学科专业：申请学位日期：赵纪伟田梦君副教授机械电子工程二零零七年三月AbstractTheaccelerometerlSoneofthemostimportant1nertialmeasurementunitsusedininertialnavigationandguidanceofaseriesofmilitarysystems．Thecapacitivemicro—aceelerometerhasbeencommonl

2、yusedduetotheirhighaccuracy，lowdrift，lowpowerdissipation，lownoise，lowtemperaturecoefficientandhighsensitivitycharacteristicsComparedwithbulkmicromachining，thesurfacemicromachininghastheadvantagesoflowmanufacturingcostandeasyintegrationwithCMOScircuits．Comparedwithoperatinginopen—loopmod

3、e，theaccelerometeroperatinginclose—loopmodecanimproveitslinearity,dynamicrange，andbandwidth，meanwhile，decreasetherequirementinfabrication．Thesigma—deltamodulationisatechniquenormallyusedinhigh-resolutionA／Dconversioninlowfrequencydomain．Thesigma-deltamicro—accelerometerisamicro—electro—

4、mechanicalsystem，whichoperatesinclose·loopmodebyapplyingthetechniqueofsigma-deltamodulationtosurfacemScromachiningcapacitivemicro-accelerometer．Itisparticularlyattractiveforthatitprovidesdigitaloutput，Canbeeasilyimplementedinhi庐densityCMOStechnologies，andenablesintegrationwithdigitalsig

5、nalprocessingcircuitry．Theprincipleofmicro—accelerometerhasbeenintroducedinthispaper,andadvantagesofclose—loopmodehavebeenpresented．Combiningthetechniqueofsigma-deltamodulation，amodelofonekindofcapacitivemicro—accelerometeroperatinginclose—loopmode---sigma—deltamicro—aecelemmeterhasbeen

6、designed．Asimulationmodelofsigma--deltamicro--accelerometeriscreatedinMATLABSIMULINK．Thespectrumanalysishasbeendoneonoutr)utsofthesimulationmodelAdigitalsignalprocessingblockhasbeendesignedforoutputsofthesimulationmodel，viaasoftwareprogramwritteninMATLAB．ThePWMoutputisdemodulatedandthei

7、nputaccelerationisrecoveredbyusingthedigitalsignalprocessingblock．Simulationshavebeendonethroughadjustingparameterssuchasinputsignalamplitude，feedbackgain，amplifiergain，comparatorgainandthepositionofthephasecompensator．Analyseshavebeendoneonthewaveformsrecoveredusingthesinusoid