气动式室温红外探测器的微电容快速测试系统的设计与实现

《气动式室温红外探测器的微电容快速测试系统的设计与实现》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、国内图书分类号：TN215题目英文并列题目V7S2653单位代码：10005学号：S200202027密级：北京工业大学硕士学位论文氢麴式窒漫红鲣拯测矍丝鱼奎迭蕉型试丕筮曲篮盐皇塞堡DESIGNANDREALIZATIONFORSMALLCAPCITANCEFASTTESTINGSYSTEMFORAPNEUMATICR00MTE肝ERATUREINFRAREDDETECTOR研究生姓名：垒塞蹩专业：微鱼王堂皇固链盘王堂研究方向：主昱住逍电王堂导师姓名：沈出丝职称：熬援论文报告提变日期2Q世生I目学位授予日期——授予单位名称和

2、地址jE塞王些盍堂韭基堕貂田匡王墨国!业呈北京工业大学工学硕士学位论文ABSTRACTTheinfrareddetectoriSonekindofinfraredradiantconvertorandthecoreoftheinfraredtechnology，itwidelyusedinmanyfiledssuchasMilitary，MedicalCare，Industry，metallurgyandSOon．AnovelcapacitiveroomtemperaturehighsensitireIRdetectoris

3、basedonnewIRdetectingmechanismpresentedbyPro．Shenguangdi，hayingcharacteristicsofhighresponse，sensitivity，wave]engthse]ectingeteTheIRdetectorhasgoodjobforhighresponserateontheroomtemperaturesurroundings．1tmakesforintegrationandmicrominiaturizationusingSi¨conMEMStech

4、nology，developingnewapproachtoIRdetector．CapacitiveroomtemperatureIRdetectorsarefabricaredwithcapacitaneeinitialvalueverysmallbasedonIRhypersensitivegasimbibingIRradiationdirectlyprinciple，whichisonlyabouttenspF，theswitchiSonlyabout10to20percentoftheinitialValue，an

5、dtheusefuloutputsignaliSveryweak．Forthecapacitivedetector，thestraycapacitancesarealwaysthesanleasmeasuredcapacitance，sometimeslargerthanmeasuredcapacitance，SOthemeasuedvariablecanhesubmergedbyinterferentialsignal．Becausethedevicehavinghighresponsonse，itneedshighers

6、锄plerate，butthecontradidtionbetweensaIIlplerateandreducecircuitnoiseiSdifficulttosolve．Furthermorenomatterwhatmicro—capacitancemeasuringmethodyouadopt，theeffectofcircuitrynoiseiSserious．Sothatthemeasuredcircuitshouldhasmuchmoretrait．TheprimaryworkofthisPaDeriethatI

7、designandimplementthemicro—measuredsystemofaPneumatiCRoomTemperatureInfraredDetector．ContentofthispaperareaSfollows：i．Pointoutthetargetofresearchingonmeasurementcircuitandnecessityofintegrationandthegreatrolethatthedetectioncircuitplaysinimprovingthesystem’Sperform

8、ance，andthenbrieflyintroduceandanalysethemechanismofmicro—capacitancesensormeasuredCircuitwhichwidelyusedinrecenttime．2．Detaileddepictedthetwodif