精密位移、振动测量的电容法研究

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1、北京交通大学硕士学位论文精密位移、振动测量的电容法研究姓名：朱义强申请学位级别：硕士专业：机械电子工程指导教师：邓湘20080601ABSTRACTABSTRACTNon—contactcapacitancemicrometertechnologyisanewimportanttechniqueofmicro／nanometermeasurement，whichhasdevelopedrapidlyinrecentyears．Ithasmanyadvantagessuchasfastdynamicresponse，goodtemperaturestability,w

2、idemeasuringrange，highprecision，smallvolume，lightweight，simplestructure，hi曲systemnaturalfrequency,etc．Sothiskindoftechnologyiswidelyusedtomeasuremicrodisplacements，vibrations，sizes，angleandpressureintheareaofaeronautical，astronauticalandindustrydepartments．Manyresearchachievementsofcap

3、acitancemicrometertechnologyhavebeengainedinthestaticandquasi-staticmeasurements，butitisstillinakeystageinthedynamicmeasurement．Forexample，dynamicfilteringproblem，thedynamicfrequencyresponseofsensorsandmeasuringcircuitisneededtobeenhanced，theprecisionmeasurementofsignalamplitudeandwave

4、formdisplay,stability,etc．Thepurposeofthisdissertationismajorinstudyingandachievingdynamicsignalmeasurementonthebasisofimprovingthestaticandquasi·staticmeasurementaccuracyandstability．Theprincipleofcapacitancemethodforprecisiondisplacementandvibrationmeasurementissystematicallyanalyzed

5、inthedissertation．Thefactorsofeffectingcapacitancesensor’Soutputaretheoreticallyanalyzedandcalculated，andthestructureandsizeofsensorhavebeenoptimizedanddesigned．Besides，thedynamicfilterformeasuringissimulativeanalyzedandcomparativestudied．Thedynamicfiltercircuitisalsodesignedandrealize

6、dwhichCanachievethemeasurementofprecisiondisplacementandvibrationsignalbetween0kHzand3kHz，andthetestresultsshowthatitcanmeetthedynamictestingdemands．Basedonhigh—speedUSB-baseddatacollection，10nanometerresolutionofthetestsystemissetupforprecisiondynamicvibrationwitllcapacitancemethod，an

7、dalotofimprovementhasdoneinthecircuitonthebasisofalargenumberofexperimentalstudies，thusthestabilityandreliabilityoftheinstrumentsystemisimproved．Themainsourcesoferrorsofthewholetestingsystemaretheoreticallyanalyzedindetail，andthenon-linearerrorcompensationimprovestheaccuracyofthesyst